Micromachining of stabilised porous silicon with several morphological features
A micromachining process on stabilised luminescent porous silicon (PS) using KOH was performed, for the purpose of using it in microstructures fabrication. A selective etching process using KOH aqueous solutions was developed to isolate luminescent PS regions with controlled geometrical features. As...
| Autores: | , , , , |
|---|---|
| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 1999 |
| País: | México |
| Institución: | Instituto Nacional de Astrofísica, Óptica y Electrónica |
| Repositorio: | Redalyc-INAOE |
| OAI Identifier: | oai:redalyc.org:94200962 |
| Acceso en línea: | https://www.redalyc.org/articulo.oa?id=94200962 |
| Access Level: | acceso abierto |
| Palabra clave: | Física, Astronomía y Matemáticas Porous Silicon Photoluminescence Cathodoluminescence Silicon Micromachining |
| Sumario: | A micromachining process on stabilised luminescent porous silicon (PS) using KOH was performed, for the purpose of using it in microstructures fabrication. A selective etching process using KOH aqueous solutions was developed to isolate luminescent PS regions with controlled geometrical features. As anodized PS and stabilised micromachined PS were analysed using photoluminescence and cathodoluminescence tools. The micromachining technique developed in this work is compatible with the standard MOS technology, which is to be applied to fabricate silicon luminescent microstructures |
|---|