Structural characterization of microcrystalline-amorphous hydrogenated silicon samples prepared by PECVD method

Article

Bibliographic Details
Author: Rojas López, Marlon
Format: article
Status:Published version
Publication Date:2012
Country:México
Institution:Instituto Politécnico Nacional
Repository:Repositorio Digital del IPN
OAI Identifier:oai:www.repositoriodigital.ipn.mx:123456789/9016
Online Access:http://www.repositoriodigital.ipn.mx/handle/123456789/9016
Access Level:Open access
Keyword:Amorphous silicon
Description
Summary:Article