Diamond-like carbon deposition by laser ablation
The plasma plume generated during laser ablation of a carbon target (graphite 99.99%), is characterized by means ofOptical Emission Spectroscopy (OES) and the Langmuir probe technique. Both techniques allow the determination of themean kinetic energy of ions present in the plasma. Besides that, info...
| Autores: | , , , , |
|---|---|
| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2003 |
| País: | México |
| Institución: | Universidad Nacional Autónoma de México |
| Repositorio: | Redalyc-UNAM |
| OAI Identifier: | oai:redalyc.org:94216409 |
| Acceso en línea: | https://www.redalyc.org/articulo.oa?id=94216409 |
| Access Level: | acceso abierto |
| Palabra clave: | Física, Astronomía y Matemáticas EELS Laser ablation Raman spectroscopy Diamond like carbon films |
| Sumario: | The plasma plume generated during laser ablation of a carbon target (graphite 99.99%), is characterized by means ofOptical Emission Spectroscopy (OES) and the Langmuir probe technique. Both techniques allow the determination of themean kinetic energy of ions present in the plasma. Besides that, information about the excited species and the plasmadensity is obtained. Ablation is carried out using a Nd:YAG laser operated at the fundamental frequency with laserfluences in the range of 2 to 6 J/cm2 . The main excited specie in the plasma is the C+ (299.26 and 426.7 nm). The kineticenergy of these ions can be varied from 100 eV up to 500 eV, as a function of the used fluence. The plasma density variesfrom 2 x 1012 cm-3 up to 9 x 1013 cm-3, depending on the fluence and on the target-probe distance. Different samples ofamorphous carbon thin films were deposited using different plasma parameters. The films show a sp3/sp2 ratio whichdepend on the plasma conditions: a higher ratio is obtained for high densities and medium ion kinetic energies (about 200eV). A 60% sp3 content, in some samples, could be obtained in these experiments. The deposited films were analyzedusing Raman spectroscopy and EELS |
|---|