Modeling and Parameter Extraction of Test Fixtures for MOSFET On-Wafer Measurements up to 60 GHz

We present a circuit model and parameter determination methodology for test fixtures used for on-wafer S-parameter measurements on CMOS devices. The model incorporates the frequency dependence of the series resistances and inductances due to the skin effect occurring in the metal pads. Physically ba...

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Detalles Bibliográficos
Autores: GERMAN ANDRES ALVAREZ BOTERO, Reydezel Torres Torres, Roberto Stack Murphy Arteaga
Tipo de recurso: artículo
Estado:Versión aceptada para publicación
Fecha de publicación:2013
País:México
Institución:Instituto Nacional de Astrofísica, Óptica y Electrónica
Repositorio:Repositorio Institucional del INAOE
Idioma:inglés
OAI Identifier:oai:inaoe.repositorioinstitucional.mx:1009/2323
Acceso en línea:http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/2323
Access Level:acceso abierto
Palabra clave:info:eu-repo/classification/Inspec/RF-measurements
info:eu-repo/classification/Inspec/S-parameters
info:eu-repo/classification/Inspec/Test fixtures
info:eu-repo/classification/Inspec/Equivalent circuit modeling
info:eu-repo/classification/Inspec/CMOS devices
info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/22
info:eu-repo/classification/cti/2203
Descripción
Sumario:We present a circuit model and parameter determination methodology for test fixtures used for on-wafer S-parameter measurements on CMOS devices. The model incorporates the frequency dependence of the series resistances and inductances due to the skin effect occurring in the metal pads. Physically based representations for this effect allow for excellent theory-experiment correlations for different dummy structures, as well as when de-embedding transistor measurements up to 60 GHz. VC 2012 Wiley Periodicals, Inc. IntJ RF and Microwave CAE 23:655–661, 2013.