Optimization of a novel micro-opto-X-ray imaging lens

A mechanically deformable reflection transmission MOEMS system is capable of focusing X-rays to sub micron spots. This paper considers the geometry of the proposed deformed slotted microcantilever lens element under thermally derived strain, using finite element analysis. The work shows that an opti...

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Detalles Bibliográficos
Autores: Ostadi, Hossein, Arroyo Balaguer, Marino|||0000-0003-1647-940X, Prewett, P.D., Jiang, K.C., Huq, S.E.
Tipo de recurso: artículo
Fecha de publicación:2008
País:España
Institución:Universitat Politècnica de Catalunya (UPC)
Repositorio:UPCommons. Portal del coneixement obert de la UPC
Idioma:inglés
OAI Identifier:oai:upcommons.upc.edu:2117/8157
Acceso en línea:https://hdl.handle.net/2117/8157
https://dx.doi.org/10.1016/j.mee.2008.01.096
Access Level:acceso abierto
Palabra clave:X-ray
Raigs X
Àrees temàtiques de la UPC::Física::Electromagnetisme::Raigs X
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spelling Optimization of a novel micro-opto-X-ray imaging lensOstadi, HosseinArroyo Balaguer, Marino|||0000-0003-1647-940XPrewett, P.D.Jiang, K.C.Huq, S.E.X-rayRaigs XÀrees temàtiques de la UPC::Física::Electromagnetisme::Raigs XA mechanically deformable reflection transmission MOEMS system is capable of focusing X-rays to sub micron spots. This paper considers the geometry of the proposed deformed slotted microcantilever lens element under thermally derived strain, using finite element analysis. The work shows that an optimized MOEMS design using a slotted polyimide/gold thermal bimorph cantilever is capable of achieving ideal geometry with a larger than expected number of focusing slots – up to 111 at 2 μm width.Peer Reviewed20082008-06-0120102010-07-13journal articlehttp://purl.org/coar/resource_type/c_6501AMhttp://purl.org/coar/version/c_ab4af688f83e57aainfo:eu-repo/semantics/articleapplication/pdfhttps://hdl.handle.net/2117/8157https://dx.doi.org/10.1016/j.mee.2008.01.096reponame:UPCommons. Portal del coneixement obert de la UPCinstname:Universitat Politècnica de Catalunya (UPC)Inglésengopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:upcommons.upc.edu:2117/81572026-05-27T15:37:01Z
dc.title.none.fl_str_mv Optimization of a novel micro-opto-X-ray imaging lens
title Optimization of a novel micro-opto-X-ray imaging lens
spellingShingle Optimization of a novel micro-opto-X-ray imaging lens
Ostadi, Hossein
X-ray
Raigs X
Àrees temàtiques de la UPC::Física::Electromagnetisme::Raigs X
title_short Optimization of a novel micro-opto-X-ray imaging lens
title_full Optimization of a novel micro-opto-X-ray imaging lens
title_fullStr Optimization of a novel micro-opto-X-ray imaging lens
title_full_unstemmed Optimization of a novel micro-opto-X-ray imaging lens
title_sort Optimization of a novel micro-opto-X-ray imaging lens
dc.creator.none.fl_str_mv Ostadi, Hossein
Arroyo Balaguer, Marino|||0000-0003-1647-940X
Prewett, P.D.
Jiang, K.C.
Huq, S.E.
author Ostadi, Hossein
author_facet Ostadi, Hossein
Arroyo Balaguer, Marino|||0000-0003-1647-940X
Prewett, P.D.
Jiang, K.C.
Huq, S.E.
author_role author
author2 Arroyo Balaguer, Marino|||0000-0003-1647-940X
Prewett, P.D.
Jiang, K.C.
Huq, S.E.
author2_role author
author
author
author
dc.subject.none.fl_str_mv X-ray
Raigs X
Àrees temàtiques de la UPC::Física::Electromagnetisme::Raigs X
topic X-ray
Raigs X
Àrees temàtiques de la UPC::Física::Electromagnetisme::Raigs X
description A mechanically deformable reflection transmission MOEMS system is capable of focusing X-rays to sub micron spots. This paper considers the geometry of the proposed deformed slotted microcantilever lens element under thermally derived strain, using finite element analysis. The work shows that an optimized MOEMS design using a slotted polyimide/gold thermal bimorph cantilever is capable of achieving ideal geometry with a larger than expected number of focusing slots – up to 111 at 2 μm width.
publishDate 2008
dc.date.none.fl_str_mv 2008
2008-06-01
2010
2010-07-13
dc.type.none.fl_str_mv journal article
http://purl.org/coar/resource_type/c_6501
AM
http://purl.org/coar/version/c_ab4af688f83e57aa
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://hdl.handle.net/2117/8157
https://dx.doi.org/10.1016/j.mee.2008.01.096
url https://hdl.handle.net/2117/8157
https://dx.doi.org/10.1016/j.mee.2008.01.096
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:UPCommons. Portal del coneixement obert de la UPC
instname:Universitat Politècnica de Catalunya (UPC)
instname_str Universitat Politècnica de Catalunya (UPC)
reponame_str UPCommons. Portal del coneixement obert de la UPC
collection UPCommons. Portal del coneixement obert de la UPC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,300724

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