Optimization of a novel micro-opto-X-ray imaging lens
A mechanically deformable reflection transmission MOEMS system is capable of focusing X-rays to sub micron spots. This paper considers the geometry of the proposed deformed slotted microcantilever lens element under thermally derived strain, using finite element analysis. The work shows that an opti...
| Autores: | , , , , |
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| Tipo de recurso: | artículo |
| Fecha de publicación: | 2008 |
| País: | España |
| Institución: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglés |
| OAI Identifier: | oai:upcommons.upc.edu:2117/8157 |
| Acceso en línea: | https://hdl.handle.net/2117/8157 https://dx.doi.org/10.1016/j.mee.2008.01.096 |
| Access Level: | acceso abierto |
| Palabra clave: | X-ray Raigs X Àrees temàtiques de la UPC::Física::Electromagnetisme::Raigs X |
| Sumario: | A mechanically deformable reflection transmission MOEMS system is capable of focusing X-rays to sub micron spots. This paper considers the geometry of the proposed deformed slotted microcantilever lens element under thermally derived strain, using finite element analysis. The work shows that an optimized MOEMS design using a slotted polyimide/gold thermal bimorph cantilever is capable of achieving ideal geometry with a larger than expected number of focusing slots – up to 111 at 2 μm width. |
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