Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators

Detalles Bibliográficos
Autores: Iborra Grau, Enrique|||0000-0002-1385-1379, Clement Lorenzo, Marta|||0000-0003-4956-8206, Capilla Osorio, José, Olivares Roza, Jimena|||0000-0003-4396-4363, Felmetsger, Valeriy
Tipo de recurso: artículo
Fecha de publicación:2012
País:España
Institución:Universidad Politécnica de Madrid
Repositorio:Archivo Digital UPM
OAI Identifier:oai:oa.upm.es:15682
Acceso en línea:https://oa.upm.es/15682/
Access Level:acceso abierto
Palabra clave:Piezoelectric AlN
Crystal quality
AC reactive sputtering
Two-step deposition
High frequency solidly mounted resonator
Electromechanical coupling factor
Quality factor
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spelling Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonatorsIborra Grau, Enrique|||0000-0002-1385-1379Clement Lorenzo, Marta|||0000-0003-4956-8206Capilla Osorio, JoséOlivares Roza, Jimena|||0000-0003-4396-4363Felmetsger, ValeriyPiezoelectric AlNCrystal qualityAC reactive sputteringTwo-step depositionHigh frequency solidly mounted resonatorElectromechanical coupling factorQuality factor20122012-01-01journal articlehttp://purl.org/coar/resource_type/c_6501info:eu-repo/semantics/articlehttps://oa.upm.es/15682/reponame:Archivo Digital UPMinstname:Universidad Politécnica de MadridInglésenopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:oa.upm.es:156822026-06-21T12:45:07Z
dc.title.none.fl_str_mv Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
title Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
spellingShingle Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
Iborra Grau, Enrique|||0000-0002-1385-1379
Piezoelectric AlN
Crystal quality
AC reactive sputtering
Two-step deposition
High frequency solidly mounted resonator
Electromechanical coupling factor
Quality factor
title_short Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
title_full Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
title_fullStr Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
title_full_unstemmed Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
title_sort Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
dc.creator.none.fl_str_mv Iborra Grau, Enrique|||0000-0002-1385-1379
Clement Lorenzo, Marta|||0000-0003-4956-8206
Capilla Osorio, José
Olivares Roza, Jimena|||0000-0003-4396-4363
Felmetsger, Valeriy
author Iborra Grau, Enrique|||0000-0002-1385-1379
author_facet Iborra Grau, Enrique|||0000-0002-1385-1379
Clement Lorenzo, Marta|||0000-0003-4956-8206
Capilla Osorio, José
Olivares Roza, Jimena|||0000-0003-4396-4363
Felmetsger, Valeriy
author_role author
author2 Clement Lorenzo, Marta|||0000-0003-4956-8206
Capilla Osorio, José
Olivares Roza, Jimena|||0000-0003-4396-4363
Felmetsger, Valeriy
author2_role author
author
author
author
dc.subject.none.fl_str_mv Piezoelectric AlN
Crystal quality
AC reactive sputtering
Two-step deposition
High frequency solidly mounted resonator
Electromechanical coupling factor
Quality factor
topic Piezoelectric AlN
Crystal quality
AC reactive sputtering
Two-step deposition
High frequency solidly mounted resonator
Electromechanical coupling factor
Quality factor
publishDate 2012
dc.date.none.fl_str_mv 2012
2012-01-01
dc.type.none.fl_str_mv journal article
http://purl.org/coar/resource_type/c_6501
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://oa.upm.es/15682/
url https://oa.upm.es/15682/
dc.language.none.fl_str_mv Inglés
en
language_invalid_str_mv Inglés
en
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.source.none.fl_str_mv reponame:Archivo Digital UPM
instname:Universidad Politécnica de Madrid
instname_str Universidad Politécnica de Madrid
reponame_str Archivo Digital UPM
collection Archivo Digital UPM
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,301603

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