Identifying the nature of surface chemical modification for directed self-assembly of block copolymers

In recent years, block copolymer lithography has emerged as a viable alternative technology for advanced lithography. In chemicalepitaxy- directed self-assembly, the interfacial energy between the substrate and each block copolymer domain plays a key role on the final ordering. Here, we focus on the...

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Autores: Evangelio, Laura, Gramazio, Federico, Lorenzoni, Matteo, Gorgoi, Michaela, Espinosa, Francisco M., García García, Ricardo, Perez Murano, Francesc X., Fraxedas, J.
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2017
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/188200
Acceso en línea:http://hdl.handle.net/10261/188200
Access Level:acceso abierto
Palabra clave:Directed self-assembly
X-ray photoemission spectroscopy
Thin film
Chemical guiding patterns
Block copolymers
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spelling Identifying the nature of surface chemical modification for directed self-assembly of block copolymersEvangelio, LauraGramazio, FedericoLorenzoni, MatteoGorgoi, MichaelaEspinosa, Francisco M.García García, RicardoPerez Murano, Francesc X.Fraxedas, J.Directed self-assemblyX-ray photoemission spectroscopyThin filmChemical guiding patternsBlock copolymersIn recent years, block copolymer lithography has emerged as a viable alternative technology for advanced lithography. In chemicalepitaxy- directed self-assembly, the interfacial energy between the substrate and each block copolymer domain plays a key role on the final ordering. Here, we focus on the experimental characterization of the chemical interactions that occur at the interface built between different chemical guiding patterns and the domains of the block copolymers. We have chosen hard X-ray high kinetic energy photoelectron spectroscopy as an exploration technique because it provides information on the electronic structure of buried interfaces. The outcome of the characterization sheds light onto key aspects of directed self-assembly: grafted brush layer, chemical pattern creation and brush/block co-polymer interface.The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2007-2013) within the projects CoLiSA (FP7-ICT-2013-11) and SNM (FP7-ICT-2011-8) and from MINECO (Nanointegra, TEC2015-69864-R). Financial support under the CALIPSO Programme (HZBPHOTONS_CALIPSO-96) is highly appreciated. ICN2 acknowledges support from the Severo Ochoa Program (MINECO, Grant SEV-2013-0295) and from the CERCA Programme (Generalitat de Catalunya). Ricardo García acknowledges financial support from MAT2013-4458-R. Laura Evangelio acknowledges the Ministry of Education of Spain for her FPU grant (FPU 13/03746).Beilstein InstitutGeneralitat de CatalunyaEuropean CommissionMinisterio de Educación, Cultura y Deporte (España)Ministerio de Economía y Competitividad (España)Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]2019201920172019info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionhttp://hdl.handle.net/10261/188200reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglés#PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE#info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/TEC2015-69864-Rinfo:eu-repo/grantAgreement/EC/FP7/619793info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2013-4458-Rinfo:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/SEV-2013-0295info:eu-repo/grantAgreement/EC/FP7/318804http://doi.org/10.3762/bjnano.8.198Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/1882002026-05-22T06:33:51Z
dc.title.none.fl_str_mv Identifying the nature of surface chemical modification for directed self-assembly of block copolymers
title Identifying the nature of surface chemical modification for directed self-assembly of block copolymers
spellingShingle Identifying the nature of surface chemical modification for directed self-assembly of block copolymers
Evangelio, Laura
Directed self-assembly
X-ray photoemission spectroscopy
Thin film
Chemical guiding patterns
Block copolymers
title_short Identifying the nature of surface chemical modification for directed self-assembly of block copolymers
title_full Identifying the nature of surface chemical modification for directed self-assembly of block copolymers
title_fullStr Identifying the nature of surface chemical modification for directed self-assembly of block copolymers
title_full_unstemmed Identifying the nature of surface chemical modification for directed self-assembly of block copolymers
title_sort Identifying the nature of surface chemical modification for directed self-assembly of block copolymers
dc.creator.none.fl_str_mv Evangelio, Laura
Gramazio, Federico
Lorenzoni, Matteo
Gorgoi, Michaela
Espinosa, Francisco M.
García García, Ricardo
Perez Murano, Francesc X.
Fraxedas, J.
author Evangelio, Laura
author_facet Evangelio, Laura
Gramazio, Federico
Lorenzoni, Matteo
Gorgoi, Michaela
Espinosa, Francisco M.
García García, Ricardo
Perez Murano, Francesc X.
Fraxedas, J.
author_role author
author2 Gramazio, Federico
Lorenzoni, Matteo
Gorgoi, Michaela
Espinosa, Francisco M.
García García, Ricardo
Perez Murano, Francesc X.
Fraxedas, J.
author2_role author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Generalitat de Catalunya
European Commission
Ministerio de Educación, Cultura y Deporte (España)
Ministerio de Economía y Competitividad (España)
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Directed self-assembly
X-ray photoemission spectroscopy
Thin film
Chemical guiding patterns
Block copolymers
topic Directed self-assembly
X-ray photoemission spectroscopy
Thin film
Chemical guiding patterns
Block copolymers
description In recent years, block copolymer lithography has emerged as a viable alternative technology for advanced lithography. In chemicalepitaxy- directed self-assembly, the interfacial energy between the substrate and each block copolymer domain plays a key role on the final ordering. Here, we focus on the experimental characterization of the chemical interactions that occur at the interface built between different chemical guiding patterns and the domains of the block copolymers. We have chosen hard X-ray high kinetic energy photoelectron spectroscopy as an exploration technique because it provides information on the electronic structure of buried interfaces. The outcome of the characterization sheds light onto key aspects of directed self-assembly: grafted brush layer, chemical pattern creation and brush/block co-polymer interface.
publishDate 2017
dc.date.none.fl_str_mv 2017
2019
2019
2019
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Publisher's version
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/188200
url http://hdl.handle.net/10261/188200
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv #PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/TEC2015-69864-R
info:eu-repo/grantAgreement/EC/FP7/619793
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2013-4458-R
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/SEV-2013-0295
info:eu-repo/grantAgreement/EC/FP7/318804
http://doi.org/10.3762/bjnano.8.198
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Beilstein Institut
publisher.none.fl_str_mv Beilstein Institut
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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