Silicon Nitride Building Blocks in the Visible Range of the Spectrum

In this study, a platform guiding single-moded light at wavelengths of 480 nm, 520 nm and 633 nm (blue, green and red) is proposed and designed with several components being fabricated and characterised for the specific wavelength of 633 nm. A waveguide with propagation losses of 3.6 dB/cm is obtain...

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Detalles Bibliográficos
Autores: Blasco-Solvas, Marcal, Fernandez-Vior, Berta, Sabek, Jad, Fernandez-Gavela, Adrian, Dominguez-Bucio, Thalia, Gardes, Frederic Y., Dominguez-Horna, Carlos, Faneca, Joaquín
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2024
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/396081
Acceso en línea:http://hdl.handle.net/10261/396081
https://api.elsevier.com/content/abstract/scopus_id/85194049513
Access Level:acceso abierto
Palabra clave:building blocks | integrated photonics | silicon nitride | Silicon photonics | visible spectrum
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Descripción
Sumario:In this study, a platform guiding single-moded light at wavelengths of 480 nm, 520 nm and 633 nm (blue, green and red) is proposed and designed with several components being fabricated and characterised for the specific wavelength of 633 nm. A waveguide with propagation losses of 3.6 dB/cm is obtained, with a high confinement factor of 90.5% and a tight bending radius of 60 μm with 0.2 dB losses per bend, offering a good trade-off between losses, confinement factor and compactness. Also, a 1 × 2 MMI is demonstrated, with a footprint of 5 × 161 μm<sup>2</sup>, and losses of 0.2 dB. Finally, a silicon nitride single-layer grating coupler has been validated to allow the fibre-to-chip coupling, with losses smaller than 11.7 dB. A comparison of the proposed platform with other state-of-the-art stoichiometric silicon nitride technologies performing in the range of the spectrum of 630-660 nm is shown. The present platform demonstrates losses in the order of the state-of-the-art single-mode waveguides, but with an enhancement of the confinement factor from 61% to 90.5%, which allows to decrease the bending radius by 20 μm or more compared with other state-of-the-art technologies.