Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators

Micro and nanotechnologies are called to play a key role in the fabrication of small and low cost sensors with excellent performance enabling new continuous monitoring scenarios and distributed intelligence paradigms (Internet of Things, Trillion Sensors). Harvesting devices providing energy autonom...

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Autores: Fonseca, Luis, Santos, Jose Domingo, Roncaglia, Alberto, Narducci, Dario, Calaza, Carlos, Salleras, Marc, Donmez, Inci, Tarancon, Albert, Morata, Alex, Gadea, Gerard, Belsito, Luca, Zulian, Laura
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2016
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/416143
Acceso en línea:http://hdl.handle.net/10261/416143
https://api.elsevier.com/content/abstract/scopus_id/84979584134
Access Level:acceso abierto
Palabra clave:bottom-up approach
silicon nanowires
silicon technologies
thermoelectricity
top-down approach
http://metadata.un.org/sdg/9
Build resilient infrastructure, promote inclusive and sustainable industrialization and foster innovation
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spelling Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogeneratorsFonseca, LuisSantos, Jose DomingoRoncaglia, AlbertoNarducci, DarioCalaza, CarlosSalleras, MarcDonmez, InciTarancon, AlbertMorata, AlexGadea, GerardBelsito, LucaZulian, Laurabottom-up approachsilicon nanowiressilicon technologiesthermoelectricitytop-down approachhttp://metadata.un.org/sdg/9Build resilient infrastructure, promote inclusive and sustainable industrialization and foster innovationMicro and nanotechnologies are called to play a key role in the fabrication of small and low cost sensors with excellent performance enabling new continuous monitoring scenarios and distributed intelligence paradigms (Internet of Things, Trillion Sensors). Harvesting devices providing energy autonomy to those large numbers of microsensors will be essential. In those scenarios where waste heat sources are present, thermoelectricity will be the obvious choice. However, miniaturization of state of the art thermoelectric modules is not easy with the current technologies used for their fabrication. Micro and nanotechnologies offer an interesting alternative considering that silicon in nanowire form is a material with a promising thermoelectric figure of merit. This paper presents two approaches for the integration of large numbers of silicon nanowires in a cost-effective and practical way using only micromachining and thin-film processes compatible with silicon technologies. Both approaches lead to automated physical and electrical integration of medium-high density stacked arrays of crystalline or polycrystalline silicon nanowires with arbitrary length (tens to hundreds microns) and diameters below 100 nm.This work was supported by FP7-NMP-2013-SMALL-7, SiNERGY (Silicon Friendly Materials and Device Solutions for Microenergy Applications), Contract 604169.Peer reviewedEuropean Commission0000-0002-1394-80740000-0003-2850-85620000-0001-9819-76030000-0002-1933-24060000-0002-3300-46360000-0002-0384-7157Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]202620262016info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionhttp://hdl.handle.net/10261/416143https://api.elsevier.com/content/abstract/scopus_id/84979584134reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglés#PLACEHOLDER_PARENT_METADATA_VALUE#info:eu-repo/grantAgreement/EC/FP7/NMP-2013-SMALL-7Semiconductor Science and Technologyhttps://iopscience.iop.org/article/10.1088/0268-1242/31/8/084001Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/4161432026-05-22T06:33:51Z
dc.title.none.fl_str_mv Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators
title Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators
spellingShingle Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators
Fonseca, Luis
bottom-up approach
silicon nanowires
silicon technologies
thermoelectricity
top-down approach
http://metadata.un.org/sdg/9
Build resilient infrastructure, promote inclusive and sustainable industrialization and foster innovation
title_short Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators
title_full Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators
title_fullStr Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators
title_full_unstemmed Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators
title_sort Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators
dc.creator.none.fl_str_mv Fonseca, Luis
Santos, Jose Domingo
Roncaglia, Alberto
Narducci, Dario
Calaza, Carlos
Salleras, Marc
Donmez, Inci
Tarancon, Albert
Morata, Alex
Gadea, Gerard
Belsito, Luca
Zulian, Laura
author Fonseca, Luis
author_facet Fonseca, Luis
Santos, Jose Domingo
Roncaglia, Alberto
Narducci, Dario
Calaza, Carlos
Salleras, Marc
Donmez, Inci
Tarancon, Albert
Morata, Alex
Gadea, Gerard
Belsito, Luca
Zulian, Laura
author_role author
author2 Santos, Jose Domingo
Roncaglia, Alberto
Narducci, Dario
Calaza, Carlos
Salleras, Marc
Donmez, Inci
Tarancon, Albert
Morata, Alex
Gadea, Gerard
Belsito, Luca
Zulian, Laura
author2_role author
author
author
author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv European Commission
0000-0002-1394-8074
0000-0003-2850-8562
0000-0001-9819-7603
0000-0002-1933-2406
0000-0002-3300-4636
0000-0002-0384-7157
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv bottom-up approach
silicon nanowires
silicon technologies
thermoelectricity
top-down approach
http://metadata.un.org/sdg/9
Build resilient infrastructure, promote inclusive and sustainable industrialization and foster innovation
topic bottom-up approach
silicon nanowires
silicon technologies
thermoelectricity
top-down approach
http://metadata.un.org/sdg/9
Build resilient infrastructure, promote inclusive and sustainable industrialization and foster innovation
description Micro and nanotechnologies are called to play a key role in the fabrication of small and low cost sensors with excellent performance enabling new continuous monitoring scenarios and distributed intelligence paradigms (Internet of Things, Trillion Sensors). Harvesting devices providing energy autonomy to those large numbers of microsensors will be essential. In those scenarios where waste heat sources are present, thermoelectricity will be the obvious choice. However, miniaturization of state of the art thermoelectric modules is not easy with the current technologies used for their fabrication. Micro and nanotechnologies offer an interesting alternative considering that silicon in nanowire form is a material with a promising thermoelectric figure of merit. This paper presents two approaches for the integration of large numbers of silicon nanowires in a cost-effective and practical way using only micromachining and thin-film processes compatible with silicon technologies. Both approaches lead to automated physical and electrical integration of medium-high density stacked arrays of crystalline or polycrystalline silicon nanowires with arbitrary length (tens to hundreds microns) and diameters below 100 nm.
publishDate 2016
dc.date.none.fl_str_mv 2016
2026
2026
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Publisher's version
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/416143
https://api.elsevier.com/content/abstract/scopus_id/84979584134
url http://hdl.handle.net/10261/416143
https://api.elsevier.com/content/abstract/scopus_id/84979584134
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv #PLACEHOLDER_PARENT_METADATA_VALUE#
info:eu-repo/grantAgreement/EC/FP7/NMP-2013-SMALL-7
Semiconductor Science and Technology
https://iopscience.iop.org/article/10.1088/0268-1242/31/8/084001
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15.812429

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