Planar thermoelectric microgenerators based on silicon nanowires
Silicon nanowires have been implemented in microfabricated structures to develop planar thermoelectric microgenerators (μTEGs) monolithically integrated in silicon to convert heat flow from thermal gradients naturally present in the environment into electrical energy. The compatibility of typical mi...
| Autores: | , , , , , , , , , , , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2011 |
| País: | España |
| Institución: | Consejo Superior de Investigaciones Científicas (CSIC) |
| Repositorio: | DIGITAL.CSIC. Repositorio Institucional del CSIC |
| OAI Identifier: | oai:digital.csic.es:10261/378327 |
| Acceso en línea: | http://hdl.handle.net/10261/378327 https://api.elsevier.com/content/abstract/scopus_id/79955908832 |
| Access Level: | acceso abierto |
| Palabra clave: | harvesting | Microgenerator | silicon nanowires | thermoelectricity http://metadata.un.org/sdg/3 Ensure healthy lives and promote well-being for all at all ages |
| Sumario: | Silicon nanowires have been implemented in microfabricated structures to develop planar thermoelectric microgenerators (μTEGs) monolithically integrated in silicon to convert heat flow from thermal gradients naturally present in the environment into electrical energy. The compatibility of typical microfabrication technologies and the vapor-liquid-solid (VLS) mechanism employed for silicon nanowire growth has been evaluated. Low-thermal-mass suspended structures have been designed, simulated, and microfabricated on silicon-on-insulator substrates to passively generate thermal gradients and operate as microgenerators using silicon nanowires as thermoelectric material. Both electrical measurements to evaluate the connectivity of the nanowires and thermoreflectance imaging to determine the heat transfer along the device have been employed. © 2011 TMS. |
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