Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approach

Detalles Bibliográficos
Autores: Gordillo Garcia, Nuria|||0000-0003-2335-738X, Gonzalez Arrabal, Raquel|||0000-0002-4955-1925, Rivera de Mena, Antonio Juan|||0000-0002-8484-5099, Munnik, F., Agulló López, Fernando
Tipo de recurso: artículo
Fecha de publicación:2012
País:España
Institución:Universidad Politécnica de Madrid
Repositorio:Archivo Digital UPM
OAI Identifier:oai:oa.upm.es:15216
Acceso en línea:https://oa.upm.es/15216/
Access Level:acceso abierto
Palabra clave:Copper nitride
Ion beam modification of materials
Swift heavy ion irradiation
Electronic sputtering
id ES_e6529df7f01dc99c256fe2ebf5d657d5
oai_identifier_str oai:oa.upm.es:15216
network_acronym_str ES
network_name_str España
repository_id_str
spelling Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approachGordillo Garcia, Nuria|||0000-0003-2335-738XGonzalez Arrabal, Raquel|||0000-0002-4955-1925Rivera de Mena, Antonio Juan|||0000-0002-8484-5099Munnik, F.Agulló López, FernandoCopper nitrideIon beam modification of materialsSwift heavy ion irradiationElectronic sputtering20122012-10-01journal articlehttp://purl.org/coar/resource_type/c_6501info:eu-repo/semantics/articlehttps://oa.upm.es/15216/reponame:Archivo Digital UPMinstname:Universidad Politécnica de MadridInglésenopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:oa.upm.es:152162026-06-21T12:45:07Z
dc.title.none.fl_str_mv Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approach
title Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approach
spellingShingle Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approach
Gordillo Garcia, Nuria|||0000-0003-2335-738X
Copper nitride
Ion beam modification of materials
Swift heavy ion irradiation
Electronic sputtering
title_short Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approach
title_full Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approach
title_fullStr Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approach
title_full_unstemmed Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approach
title_sort Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approach
dc.creator.none.fl_str_mv Gordillo Garcia, Nuria|||0000-0003-2335-738X
Gonzalez Arrabal, Raquel|||0000-0002-4955-1925
Rivera de Mena, Antonio Juan|||0000-0002-8484-5099
Munnik, F.
Agulló López, Fernando
author Gordillo Garcia, Nuria|||0000-0003-2335-738X
author_facet Gordillo Garcia, Nuria|||0000-0003-2335-738X
Gonzalez Arrabal, Raquel|||0000-0002-4955-1925
Rivera de Mena, Antonio Juan|||0000-0002-8484-5099
Munnik, F.
Agulló López, Fernando
author_role author
author2 Gonzalez Arrabal, Raquel|||0000-0002-4955-1925
Rivera de Mena, Antonio Juan|||0000-0002-8484-5099
Munnik, F.
Agulló López, Fernando
author2_role author
author
author
author
dc.subject.none.fl_str_mv Copper nitride
Ion beam modification of materials
Swift heavy ion irradiation
Electronic sputtering
topic Copper nitride
Ion beam modification of materials
Swift heavy ion irradiation
Electronic sputtering
publishDate 2012
dc.date.none.fl_str_mv 2012
2012-10-01
dc.type.none.fl_str_mv journal article
http://purl.org/coar/resource_type/c_6501
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://oa.upm.es/15216/
url https://oa.upm.es/15216/
dc.language.none.fl_str_mv Inglés
en
language_invalid_str_mv Inglés
en
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.source.none.fl_str_mv reponame:Archivo Digital UPM
instname:Universidad Politécnica de Madrid
instname_str Universidad Politécnica de Madrid
reponame_str Archivo Digital UPM
collection Archivo Digital UPM
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869422756132552704
score 15.300719

Similares en LA Referencia