Formation of porous layers on n-GaSb by electrochemical etching

The effect of electrochemical etching of n-type GaSb in aqueous solutions of HCl and HF has been analysed. By anodization in HCl, two different morphologies of porous layers were observed depending on the current density. At low current density (0.5 mA cm_(-2)) a macroporous layer is formed with the...

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Detalles Bibliográficos
Autores: Storgards, J., Méndez Martín, María Bianchi, Piqueras De Noriega, Francisco Javier, Chenot, M., Dimroth, F., Bett, A.V.
Tipo de recurso: artículo
Fecha de publicación:2004
País:España
Institución:Universidad Complutense de Madrid (UCM)
Repositorio:Docta Complutense
Idioma:inglés
OAI Identifier:oai:docta.ucm.es:20.500.14352/50954
Acceso en línea:https://hdl.handle.net/20.500.14352/50954
Access Level:acceso abierto
Palabra clave:538.9
Silicon
Gaas
Cathodoluminescence
Semiconductors
Surface
Inp
Photoluminescence
Initiation
Growth
Pores
Física de materiales
Descripción
Sumario:The effect of electrochemical etching of n-type GaSb in aqueous solutions of HCl and HF has been analysed. By anodization in HCl, two different morphologies of porous layers were observed depending on the current density. At low current density (0.5 mA cm_(-2)) a macroporous layer is formed with the pores following preferential directions, while at high current density (15 mA cm_(-2)) pores of sizes less than 100 nm were observed. Furthermore, a comparison between the luminescence in the porous layer and bulk GaSb is also performed. On the other hand, anodization in HF leads to an electropolishing process and no porosification is obtained.