An alternative route for the synthesis of silicon nanowires via porous anodic alumina masks

Amorphous Si nanowires have been directly synthesized by a thermal processing of Si substrates. This method involves the deposition of an anodic aluminum oxide mask on a crystalline Si (100) substrate. Fe, Au, and Pt thin films with thicknesses of ca. 30 nm deposited on the anodic aluminum oxide-Si...

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Detalles Bibliográficos
Autores: Márquez, Francisco, Morant Zacarés, Carmen, López, Vicente, Zamora Abanades, Félix Juan, Campo, Teresa, Elizalde, Eduardo
Tipo de recurso: artículo
Fecha de publicación:2011
País:España
Institución:Universidad Autónoma de Madrid
Repositorio:Biblos-e Archivo. Repositorio Institucional de la UAM
Idioma:inglés
OAI Identifier:oai:repositorio.uam.es:10486/664604
Acceso en línea:http://hdl.handle.net/10486/664604
https://dx.doi.org/10.1186/1556-276X-6-495
Access Level:acceso abierto
Palabra clave:AAO
CVD
Masks
Si NWs
Física
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spelling An alternative route for the synthesis of silicon nanowires via porous anodic alumina masksMárquez, FranciscoMorant Zacarés, CarmenLópez, VicenteZamora Abanades, Félix JuanCampo, TeresaElizalde, EduardoAAOCVDMasksSi NWsFísicaAmorphous Si nanowires have been directly synthesized by a thermal processing of Si substrates. This method involves the deposition of an anodic aluminum oxide mask on a crystalline Si (100) substrate. Fe, Au, and Pt thin films with thicknesses of ca. 30 nm deposited on the anodic aluminum oxide-Si substrates have been used as catalysts. During the thermal treatment of the samples, thin films of the metal catalysts are transformed in small nanoparticles incorporated within the pore structure of the anodic aluminum oxide mask, directly in contact with the Si substrate. These homogeneously distributed metal nanoparticles are responsible for the growth of Si nanowires with regular diameter by a simple heating process at 800°C in an Ar-H2 atmosphere and without an additional Si source. The synthesized Si nanowires have been characterized by field emission scanning electron microscopy, high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and RamanThe authors gratefully recognize the financial support provided by MEC through the grants MAT2006-08158, MAT2007-66476-C02-02, MAT2010-19804 and European Community FP6-029192. Financial supports from US Department of Energy through the Massey Chair project at University of Turabo and from the National Science Foundation through the contract CHE-0959334 are also acknowledged. One of us (TC) thanks the economical support from MICROLAN S.A. The “Servicio Interdepartamental de Investigación (SIdI)” from Universidad Autónoma de Madrid and “Centro de Microscopía Luis Bru” from Universidad Complutense de Madrid are acknowledged for the use of the HRTEM and FESEM facilitiesSpringer New York2011 Márquez et al.Departamento de Física AplicadaFacultad de Ciencias20112011-08-17research articlehttp://purl.org/coar/resource_type/c_2df8fbb1VoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85info:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/10486/664604https://dx.doi.org/10.1186/1556-276X-6-495reponame:Biblos-e Archivo. Repositorio Institucional de la UAMinstname:Universidad Autónoma de MadridInglésengopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:repositorio.uam.es:10486/6646042026-06-23T12:46:27Z
dc.title.none.fl_str_mv An alternative route for the synthesis of silicon nanowires via porous anodic alumina masks
title An alternative route for the synthesis of silicon nanowires via porous anodic alumina masks
spellingShingle An alternative route for the synthesis of silicon nanowires via porous anodic alumina masks
Márquez, Francisco
AAO
CVD
Masks
Si NWs
Física
title_short An alternative route for the synthesis of silicon nanowires via porous anodic alumina masks
title_full An alternative route for the synthesis of silicon nanowires via porous anodic alumina masks
title_fullStr An alternative route for the synthesis of silicon nanowires via porous anodic alumina masks
title_full_unstemmed An alternative route for the synthesis of silicon nanowires via porous anodic alumina masks
title_sort An alternative route for the synthesis of silicon nanowires via porous anodic alumina masks
dc.creator.none.fl_str_mv Márquez, Francisco
Morant Zacarés, Carmen
López, Vicente
Zamora Abanades, Félix Juan
Campo, Teresa
Elizalde, Eduardo
author Márquez, Francisco
author_facet Márquez, Francisco
Morant Zacarés, Carmen
López, Vicente
Zamora Abanades, Félix Juan
Campo, Teresa
Elizalde, Eduardo
author_role author
author2 Morant Zacarés, Carmen
López, Vicente
Zamora Abanades, Félix Juan
Campo, Teresa
Elizalde, Eduardo
author2_role author
author
author
author
author
dc.contributor.none.fl_str_mv Departamento de Física Aplicada
Facultad de Ciencias
dc.subject.none.fl_str_mv AAO
CVD
Masks
Si NWs
Física
topic AAO
CVD
Masks
Si NWs
Física
description Amorphous Si nanowires have been directly synthesized by a thermal processing of Si substrates. This method involves the deposition of an anodic aluminum oxide mask on a crystalline Si (100) substrate. Fe, Au, and Pt thin films with thicknesses of ca. 30 nm deposited on the anodic aluminum oxide-Si substrates have been used as catalysts. During the thermal treatment of the samples, thin films of the metal catalysts are transformed in small nanoparticles incorporated within the pore structure of the anodic aluminum oxide mask, directly in contact with the Si substrate. These homogeneously distributed metal nanoparticles are responsible for the growth of Si nanowires with regular diameter by a simple heating process at 800°C in an Ar-H2 atmosphere and without an additional Si source. The synthesized Si nanowires have been characterized by field emission scanning electron microscopy, high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and Raman
publishDate 2011
dc.date.none.fl_str_mv 2011
2011-08-17
dc.type.none.fl_str_mv research article
http://purl.org/coar/resource_type/c_2df8fbb1
VoR
http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10486/664604
https://dx.doi.org/10.1186/1556-276X-6-495
url http://hdl.handle.net/10486/664604
https://dx.doi.org/10.1186/1556-276X-6-495
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Springer New York
2011 Márquez et al.
publisher.none.fl_str_mv Springer New York
2011 Márquez et al.
dc.source.none.fl_str_mv reponame:Biblos-e Archivo. Repositorio Institucional de la UAM
instname:Universidad Autónoma de Madrid
instname_str Universidad Autónoma de Madrid
reponame_str Biblos-e Archivo. Repositorio Institucional de la UAM
collection Biblos-e Archivo. Repositorio Institucional de la UAM
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,300719

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