Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control

©2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to se...

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Autores: Giounanlis, Panagiotis, Gorreta Mariné, Sergio, Domínguez Pumar, Manuel|||0000-0001-5439-7953, Pons Nin, Joan|||0000-0002-0356-5678, Feely, Orla, Blokhina, Elena
Tipo de documento: artigo
Data de publicação:2016
País:España
Recursos:Universitat Politècnica de Catalunya (UPC)
Repositório:UPCommons. Portal del coneixement obert de la UPC
Idioma:inglês
OAI Identifier:oai:upcommons.upc.edu:2117/103507
Acesso em linha:https://hdl.handle.net/2117/103507
https://dx.doi.org/10.1109/TCSII.2016.2563858
Access Level:Acceso aberto
Palavra-chave:Microelectromechanical systems
Electric discharges
Dielectrics
Micromechanical devices
Charge carrier processes
Mathematical model
Capacitance
Discharges (electric)
Electrodes
Sistemes microelectromecànics
Descàrregues elèctriques
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
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oai_identifier_str oai:upcommons.upc.edu:2117/103507
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repository_id_str
spelling Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge controlGiounanlis, PanagiotisGorreta Mariné, SergioDomínguez Pumar, Manuel|||0000-0001-5439-7953Pons Nin, Joan|||0000-0002-0356-5678Feely, OrlaBlokhina, ElenaMicroelectromechanical systemsElectric dischargesDielectricsMicromechanical devicesCharge carrier processesMathematical modelCapacitanceDischarges (electric)ElectrodesSistemes microelectromecànicsDescàrregues elèctriquesÀrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica©2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.This work investigates, analytically and experimentally, the effects induced by the use of a first-order sigma-delta (S¿) feedback loop as a control method of dielectric charging for capacitive microelectromechanical systems (MEMS). This technique allows setting of a desired level of net charge in the dielectric of a MEMS device by continuously alternating the polarity of the actuation voltage. This control system displays a number of interesting effects, inherited from S¿ modulation and not usually found in conventional MEMS applications, with the charge-locking phenomenon being the most relevant. The convergence time and the effectiveness of the control method are also investigated and discussed.Peer Reviewed20162016-05-0120172017-04-18journal articlehttp://purl.org/coar/resource_type/c_6501AMhttp://purl.org/coar/version/c_ab4af688f83e57aainfo:eu-repo/semantics/articleapplication/pdfhttps://hdl.handle.net/2117/103507https://dx.doi.org/10.1109/TCSII.2016.2563858reponame:UPCommons. Portal del coneixement obert de la UPCinstname:Universitat Politècnica de Catalunya (UPC)Inglésengopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:upcommons.upc.edu:2117/1035072026-05-27T15:37:01Z
dc.title.none.fl_str_mv Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
title Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
spellingShingle Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
Giounanlis, Panagiotis
Microelectromechanical systems
Electric discharges
Dielectrics
Micromechanical devices
Charge carrier processes
Mathematical model
Capacitance
Discharges (electric)
Electrodes
Sistemes microelectromecànics
Descàrregues elèctriques
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
title_short Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
title_full Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
title_fullStr Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
title_full_unstemmed Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
title_sort Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
dc.creator.none.fl_str_mv Giounanlis, Panagiotis
Gorreta Mariné, Sergio
Domínguez Pumar, Manuel|||0000-0001-5439-7953
Pons Nin, Joan|||0000-0002-0356-5678
Feely, Orla
Blokhina, Elena
author Giounanlis, Panagiotis
author_facet Giounanlis, Panagiotis
Gorreta Mariné, Sergio
Domínguez Pumar, Manuel|||0000-0001-5439-7953
Pons Nin, Joan|||0000-0002-0356-5678
Feely, Orla
Blokhina, Elena
author_role author
author2 Gorreta Mariné, Sergio
Domínguez Pumar, Manuel|||0000-0001-5439-7953
Pons Nin, Joan|||0000-0002-0356-5678
Feely, Orla
Blokhina, Elena
author2_role author
author
author
author
author
dc.subject.none.fl_str_mv Microelectromechanical systems
Electric discharges
Dielectrics
Micromechanical devices
Charge carrier processes
Mathematical model
Capacitance
Discharges (electric)
Electrodes
Sistemes microelectromecànics
Descàrregues elèctriques
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
topic Microelectromechanical systems
Electric discharges
Dielectrics
Micromechanical devices
Charge carrier processes
Mathematical model
Capacitance
Discharges (electric)
Electrodes
Sistemes microelectromecànics
Descàrregues elèctriques
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
description ©2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
publishDate 2016
dc.date.none.fl_str_mv 2016
2016-05-01
2017
2017-04-18
dc.type.none.fl_str_mv journal article
http://purl.org/coar/resource_type/c_6501
AM
http://purl.org/coar/version/c_ab4af688f83e57aa
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://hdl.handle.net/2117/103507
https://dx.doi.org/10.1109/TCSII.2016.2563858
url https://hdl.handle.net/2117/103507
https://dx.doi.org/10.1109/TCSII.2016.2563858
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:UPCommons. Portal del coneixement obert de la UPC
instname:Universitat Politècnica de Catalunya (UPC)
instname_str Universitat Politècnica de Catalunya (UPC)
reponame_str UPCommons. Portal del coneixement obert de la UPC
collection UPCommons. Portal del coneixement obert de la UPC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,301603

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