Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
©2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to se...
| Autores: | , , , , , |
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| Tipo de recurso: | artículo |
| Fecha de publicación: | 2016 |
| País: | España |
| Institución: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglés |
| OAI Identifier: | oai:upcommons.upc.edu:2117/103507 |
| Acceso en línea: | https://hdl.handle.net/2117/103507 https://dx.doi.org/10.1109/TCSII.2016.2563858 |
| Access Level: | acceso abierto |
| Palabra clave: | Microelectromechanical systems Electric discharges Dielectrics Micromechanical devices Charge carrier processes Mathematical model Capacitance Discharges (electric) Electrodes Sistemes microelectromecànics Descàrregues elèctriques Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
| Sumario: | ©2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. |
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