Site-specific growth and in situ integration of different nanowire material networks on a single chip: towards a nanowire-based electronic nose for gas detection
A new method for the site-selective synthesis of nanowires has been developed to enable material growth with defined morphology and at the same time different composition on the same chip surface. The chemical vapour deposition approach for the growth of these nanowire-based resistive devices using...
| Autores: | , , , , , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión aceptada para publicación |
| Fecha de publicación: | 2018 |
| País: | España |
| Institución: | Varias* (Consorci de Biblioteques Universitáries de Catalunya, Centre de Serveis Científics i Acadèmics de Catalunya) |
| Repositorio: | Recercat. Dipósit de la Recerca de Catalunya |
| OAI Identifier: | oai:recercat.cat:2445/127226 |
| Acceso en línea: | https://hdl.handle.net/2445/127226 |
| Access Level: | acceso abierto |
| Palabra clave: | Nanoestructures Detectors de gasos Germani Nanostructures Gas detectors Germanium |
| Sumario: | A new method for the site-selective synthesis of nanowires has been developed to enable material growth with defined morphology and at the same time different composition on the same chip surface. The chemical vapour deposition approach for the growth of these nanowire-based resistive devices using micromembranes can be easily modified and represents a simple, adjustable fabrica-tion process for the direct integration of nanowire meshes in multifunctional devices. This proof-of-concept study includes the deposition of SnO2, WO3 and Ge nanowires on the same chip. The individual resistors exhibit adequate gas sensing responses to-wards changing gas concentration of CO, NO2 and humidity diluted in synthetic air. The data have been processed by principal component analysis with cluster responses that can be easily separated and thus the devices described herein are in principle suita-ble for environmental monitoring. |
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