A test setup for the characterization of Lorentz-force MEMS magnetometers

© 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new collective works, for resale or redistribution to se...

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Detalhes bibliográficos
Autores: Sánchez Chiva, José María|||0000-0002-1101-6804, Valle Fraga, Juan José, Fernández Martínez, Daniel, Madrenas Boadas, Jordi|||0000-0001-5905-9179
Formato: artículo
Fecha de publicación:2021
País:España
Recursos:Universitat Politècnica de Catalunya (UPC)
Repositorio:UPCommons. Portal del coneixement obert de la UPC
Idioma:inglés
OAI Identifier:oai:upcommons.upc.edu:2117/361217
Acesso em linha:https://hdl.handle.net/2117/361217
https://dx.doi.org/10.1109/OJCAS.2021.3099869
Access Level:acceso abierto
Palavra-chave:Electromechanical decives
Electromagnetic measurements
Microelectromechanical systems
MEMS
Magnetic sensor
Magnetometer
Lorentz-force
Device characterization
Test setup
MEMS measurement
Electromecànica
Electromagnetisme--Mesuraments
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
Àrees temàtiques de la UPC::Enginyeria electrònica::Instrumentació i mesura::Compatibilitat electromagnètica
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Resumo:© 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.