A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structure

Hafnium dioxide (HfO₂) is emerging as a transformative material in the field of optical gas sensing, offering a unique combination of high stability, exceptional dielectric properties, and strong surface adsorption capabilities. This work presents the integration of HfO₂ thin films—fabricated via At...

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Autores: Correa Fernández, Ángel, Gallego Martínez, Elieser Ernesto, Ruiz Zamarreño, Carlos, Matías Maestro, Ignacio
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2026
País:España
Institución:Universidad Pública de Navarra
Repositorio:Academica-e. Repositorio Institucional de la Universidad Pública de Navarra
OAI Identifier:oai:dnet:academicae__::1ddd5409ed302fc27fcb5d284b3bb7a3
Acceso en línea:https://hdl.handle.net/2454/57011
Access Level:acceso abierto
Palabra clave:Hafnium dioxide
Hyperbolic mode
Lossy mode resonance
Optical gas sensor
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spelling A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structureCorrea Fernández, ÁngelGallego Martínez, Elieser ErnestoRuiz Zamarreño, CarlosMatías Maestro, IgnacioHafnium dioxideHyperbolic modeLossy mode resonanceOptical gas sensorHafnium dioxide (HfO₂) is emerging as a transformative material in the field of optical gas sensing, offering a unique combination of high stability, exceptional dielectric properties, and strong surface adsorption capabilities. This work presents the integration of HfO₂ thin films—fabricated via Atomic Layer Deposition (ALD)—onto planar optical waveguide structures aimed to excite Hyperbolic Mode Resonances (HMR) with a remarkable refractive index (RI) sensitivity of 3347 nm/RIU in the range 1.3098–1.4311 RIU, among the top-performing devices in this type. The device was subjected to a diverse set of gaseous species, including oxygen, ethylene, nitric oxide, methanol, ethanol, and relative humidity. It revealed an outstanding performance for NO with a sensitivity of 1.89 nm/ppm and a limit of detection (LoD) as low as 76.2 ppb when operated at room temperature (23 º C). These results underscore the potential of HfO₂ as a novel sensing material that surpasses conventional metal oxides in both versatility and performance, opening new avenues for applications in environmental monitoring, industrial safety, and biomedical diagnostics, where low-cost, high-sensitivity, and roomtemperature operation are critical.This work was supported by the Agencia Estatal de Investigacion ´ research projects, Spain (Grant Nos. PID2022–137437OB-I00 and PDC2023–145831-I00), and by the Institute of Smart Cities of the Public University of Navarra Ph.D. student grants, Spain (Grant No. 401).ElsevierIngeniería Eléctrica, Electrónica y de ComunicaciónIngeniaritza Elektrikoa, Elektronikoa eta Telekomunikazio IngeniaritzaInstitute of Smart Cities (ISC)Universidad Pública de Navarra / Nafarroako Unibertsitate Publikoa2026info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionapplication/pdfhttps://hdl.handle.net/2454/57011reponame:Academica-e. Repositorio Institucional de la Universidad Pública de Navarrainstname:Universidad Pública de NavarraInglésinfo:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2021-2023/PID2022-137437OB-I00info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2021-2023/PDC2023-145831-I00© 2026 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY license.https://creativecommons.org/licenses/by/4.0/info:eu-repo/semantics/openAccessoai:dnet:academicae__::1ddd5409ed302fc27fcb5d284b3bb7a32026-06-17T12:41:47Z
dc.title.none.fl_str_mv A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structure
title A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structure
spellingShingle A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structure
Correa Fernández, Ángel
Hafnium dioxide
Hyperbolic mode
Lossy mode resonance
Optical gas sensor
title_short A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structure
title_full A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structure
title_fullStr A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structure
title_full_unstemmed A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structure
title_sort A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structure
dc.creator.none.fl_str_mv Correa Fernández, Ángel
Gallego Martínez, Elieser Ernesto
Ruiz Zamarreño, Carlos
Matías Maestro, Ignacio
author Correa Fernández, Ángel
author_facet Correa Fernández, Ángel
Gallego Martínez, Elieser Ernesto
Ruiz Zamarreño, Carlos
Matías Maestro, Ignacio
author_role author
author2 Gallego Martínez, Elieser Ernesto
Ruiz Zamarreño, Carlos
Matías Maestro, Ignacio
author2_role author
author
author
dc.contributor.none.fl_str_mv Ingeniería Eléctrica, Electrónica y de Comunicación
Ingeniaritza Elektrikoa, Elektronikoa eta Telekomunikazio Ingeniaritza
Institute of Smart Cities (ISC)
Universidad Pública de Navarra / Nafarroako Unibertsitate Publikoa
dc.subject.none.fl_str_mv Hafnium dioxide
Hyperbolic mode
Lossy mode resonance
Optical gas sensor
topic Hafnium dioxide
Hyperbolic mode
Lossy mode resonance
Optical gas sensor
description Hafnium dioxide (HfO₂) is emerging as a transformative material in the field of optical gas sensing, offering a unique combination of high stability, exceptional dielectric properties, and strong surface adsorption capabilities. This work presents the integration of HfO₂ thin films—fabricated via Atomic Layer Deposition (ALD)—onto planar optical waveguide structures aimed to excite Hyperbolic Mode Resonances (HMR) with a remarkable refractive index (RI) sensitivity of 3347 nm/RIU in the range 1.3098–1.4311 RIU, among the top-performing devices in this type. The device was subjected to a diverse set of gaseous species, including oxygen, ethylene, nitric oxide, methanol, ethanol, and relative humidity. It revealed an outstanding performance for NO with a sensitivity of 1.89 nm/ppm and a limit of detection (LoD) as low as 76.2 ppb when operated at room temperature (23 º C). These results underscore the potential of HfO₂ as a novel sensing material that surpasses conventional metal oxides in both versatility and performance, opening new avenues for applications in environmental monitoring, industrial safety, and biomedical diagnostics, where low-cost, high-sensitivity, and roomtemperature operation are critical.
publishDate 2026
dc.date.none.fl_str_mv 2026
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv https://hdl.handle.net/2454/57011
url https://hdl.handle.net/2454/57011
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2021-2023/PID2022-137437OB-I00
info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2021-2023/PDC2023-145831-I00
dc.rights.none.fl_str_mv https://creativecommons.org/licenses/by/4.0/
info:eu-repo/semantics/openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by/4.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:Academica-e. Repositorio Institucional de la Universidad Pública de Navarra
instname:Universidad Pública de Navarra
instname_str Universidad Pública de Navarra
reponame_str Academica-e. Repositorio Institucional de la Universidad Pública de Navarra
collection Academica-e. Repositorio Institucional de la Universidad Pública de Navarra
repository.name.fl_str_mv
repository.mail.fl_str_mv
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