A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structure
Hafnium dioxide (HfO₂) is emerging as a transformative material in the field of optical gas sensing, offering a unique combination of high stability, exceptional dielectric properties, and strong surface adsorption capabilities. This work presents the integration of HfO₂ thin films—fabricated via At...
| Autores: | , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2026 |
| País: | España |
| Institución: | Universidad Pública de Navarra |
| Repositorio: | Academica-e. Repositorio Institucional de la Universidad Pública de Navarra |
| OAI Identifier: | oai:dnet:academicae__::1ddd5409ed302fc27fcb5d284b3bb7a3 |
| Acceso en línea: | https://hdl.handle.net/2454/57011 |
| Access Level: | acceso abierto |
| Palabra clave: | Hafnium dioxide Hyperbolic mode Lossy mode resonance Optical gas sensor |
| Sumario: | Hafnium dioxide (HfO₂) is emerging as a transformative material in the field of optical gas sensing, offering a unique combination of high stability, exceptional dielectric properties, and strong surface adsorption capabilities. This work presents the integration of HfO₂ thin films—fabricated via Atomic Layer Deposition (ALD)—onto planar optical waveguide structures aimed to excite Hyperbolic Mode Resonances (HMR) with a remarkable refractive index (RI) sensitivity of 3347 nm/RIU in the range 1.3098–1.4311 RIU, among the top-performing devices in this type. The device was subjected to a diverse set of gaseous species, including oxygen, ethylene, nitric oxide, methanol, ethanol, and relative humidity. It revealed an outstanding performance for NO with a sensitivity of 1.89 nm/ppm and a limit of detection (LoD) as low as 76.2 ppb when operated at room temperature (23 º C). These results underscore the potential of HfO₂ as a novel sensing material that surpasses conventional metal oxides in both versatility and performance, opening new avenues for applications in environmental monitoring, industrial safety, and biomedical diagnostics, where low-cost, high-sensitivity, and roomtemperature operation are critical. |
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