Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator...

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Detalhes bibliográficos
Autores: Perello-Roig, Rafel, Verd, Jaume, Bota, Sebastia, Segura, Jaume
Tipo de documento: artigo
Data de publicação:2020
País:España
Recursos:Instituto de Salud Carlos III (ISCIII)
Repositório:Repisalud
Idioma:inglês
OAI Identifier:oai:repisalud.isciii.es:20.500.12105/22987
Acesso em linha:https://hdl.handle.net/20.500.12105/22987
Access Level:Acceso aberto
Palavra-chave:MEMS resonators
VOCs
Temperature sensitivity
CMOS-MEMS
Gas sensors
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spelling Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas SensingPerello-Roig, RafelVerd, JaumeBota, SebastiaSegura, JaumeMEMS resonatorsVOCsTemperature sensitivityCMOS-MEMSGas sensorsBased on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator clamp shape with a corresponding non-negligible impact on the gravimetric sensor resolution. Results indicate that such an effect must be accounted when designing MEMS resonators with potential applications in the detection of volatile organic compounds (VOCs). In addition, the impact of thermal perturbations was also investigated. Two types of four-anchored CMOS-MEMS plate resonators were designed and fabricated: one with straight anchors, while the other was sustained through folded flexure clamps. The mechanical structures were monolithically integrated together with an embedded readout amplifier to operate as a self-sustained fully integrated oscillator on a commercial CMOS technology, featuring low-cost batch production and easy integration. The folded flexure anchor resonator provided a flow impact reduction of 5x compared to the straight anchor resonator, while the temperature sensitivity was enhanced to -115 ppm/degrees C, an outstanding result compared to the -2403 ppm/degrees C measured for the straight anchored structure.Multidisciplinary Digital Publishing Institute (MDPI)20242024-09-1320202020-09-0120202020-09-01research articlehttp://purl.org/coar/resource_type/c_2df8fbb1info:eu-repo/semantics/articlehttps://hdl.handle.net/20.500.12105/22987reponame:Repisaludinstname:Instituto de Salud Carlos III (ISCIII)Inglésengopen accesshttp://purl.org/coar/access_right/c_abf2Attribution 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/info:eu-repo/semantics/openAccessoai:repisalud.isciii.es:20.500.12105/229872026-06-12T12:43:37Z
dc.title.none.fl_str_mv Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
title Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
spellingShingle Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
Perello-Roig, Rafel
MEMS resonators
VOCs
Temperature sensitivity
CMOS-MEMS
Gas sensors
title_short Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
title_full Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
title_fullStr Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
title_full_unstemmed Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
title_sort Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
dc.creator.none.fl_str_mv Perello-Roig, Rafel
Verd, Jaume
Bota, Sebastia
Segura, Jaume
author Perello-Roig, Rafel
author_facet Perello-Roig, Rafel
Verd, Jaume
Bota, Sebastia
Segura, Jaume
author_role author
author2 Verd, Jaume
Bota, Sebastia
Segura, Jaume
author2_role author
author
author
dc.contributor.none.fl_str_mv
dc.subject.none.fl_str_mv MEMS resonators
VOCs
Temperature sensitivity
CMOS-MEMS
Gas sensors
topic MEMS resonators
VOCs
Temperature sensitivity
CMOS-MEMS
Gas sensors
description Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator clamp shape with a corresponding non-negligible impact on the gravimetric sensor resolution. Results indicate that such an effect must be accounted when designing MEMS resonators with potential applications in the detection of volatile organic compounds (VOCs). In addition, the impact of thermal perturbations was also investigated. Two types of four-anchored CMOS-MEMS plate resonators were designed and fabricated: one with straight anchors, while the other was sustained through folded flexure clamps. The mechanical structures were monolithically integrated together with an embedded readout amplifier to operate as a self-sustained fully integrated oscillator on a commercial CMOS technology, featuring low-cost batch production and easy integration. The folded flexure anchor resonator provided a flow impact reduction of 5x compared to the straight anchor resonator, while the temperature sensitivity was enhanced to -115 ppm/degrees C, an outstanding result compared to the -2403 ppm/degrees C measured for the straight anchored structure.
publishDate 2020
dc.date.none.fl_str_mv 2020
2020-09-01
2020
2020-09-01
2024
2024-09-13
dc.type.none.fl_str_mv research article
http://purl.org/coar/resource_type/c_2df8fbb1
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://hdl.handle.net/20.500.12105/22987
url https://hdl.handle.net/20.500.12105/22987
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute (MDPI)
publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute (MDPI)
dc.source.none.fl_str_mv reponame:Repisalud
instname:Instituto de Salud Carlos III (ISCIII)
instname_str Instituto de Salud Carlos III (ISCIII)
reponame_str Repisalud
collection Repisalud
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,811543

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