Simple fabrication of ultrahigh aspect ratio nanostructures for enhanced antireflectivity

In this work, the authors present a novel fabrication process to create periodic nanostructures with aspect ratio as high as 9.6. These nanostructures reduce spectral reflectance of silicon to less than 4% over the broad wavelength region from 200 to 2000nm. At the visible range of the spectrum, fro...

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Detalhes bibliográficos
Autores: Domínguez Fernández, Sagrario, Cornago Santos, Ignacio, Bravo Larrea, Javier, Pérez Conde, Jesús, Choi, Hyungryul J., Kim, Jeong-Gil, Barbastathis, George
Tipo de documento: artigo
Estado:Versão publicada
Data de publicação:2014
País:España
Recursos:Universidad Pública de Navarra
Repositório:Academica-e. Repositorio Institucional de la Universidad Pública de Navarra
OAI Identifier:oai:academica-e.unavarra.es:2454/20888
Acesso em linha:https://hdl.handle.net/2454/20888
Access Level:Acceso aberto
Palavra-chave:Nanostructures
Antireflectivity
Silicon
Descrição
Resumo:In this work, the authors present a novel fabrication process to create periodic nanostructures with aspect ratio as high as 9.6. These nanostructures reduce spectral reflectance of silicon to less than 4% over the broad wavelength region from 200 to 2000nm. At the visible range of the spectrum, from 200 to 650 nm, reflectivity is reduced to less than 0.1%. The aspect ratio and reflectance performance that the authors achieved have never been reported before for ordered tapered nanostructures, to our knowledge.