A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization

CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical performance otherwise achieved by specific technologies,...

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Detalles Bibliográficos
Autores: Perello-Roig, Rafel, Verd, Jaume, Bota, Sebastia, Segura, Jaume
Tipo de recurso: artículo
Fecha de publicación:2021
País:España
Institución:Conselleria de Salut i Consum del Govern de les Illes Balears
Repositorio:Docusalut
Idioma:inglés
OAI Identifier:oai:docusalut.com:20.500.13003/10997
Acceso en línea:https://hdl.handle.net/20.500.13003/10997
Access Level:acceso abierto
Palabra clave:transimpedance amplifier
RF MEMS
oscillator
CMOS-MEMS
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network_acronym_str ES
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repository_id_str
spelling A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators CharacterizationPerello-Roig, RafelVerd, JaumeBota, SebastiaSegura, Jaumetransimpedance amplifierRF MEMSoscillatorCMOS-MEMSCMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical performance otherwise achieved by specific technologies, requiring a challenging readout circuitry. This paper presents a transimpedance amplifier (TIA) fabricated using a commercial 0.35-mu m CMOS technology specifically oriented to drive and sense monolithically integrated CMOS-MEMS resonators up to 50 MHz with a tunable transimpedance gain ranging from 112 dB to 121 dB. The output voltage noise is as low as 225 nV/Hz(1/2)-input-referred current noise of 192 fA/Hz(1/2)-at 10 MHz, and the power consumption is kept below 1-mW. In addition, the TIA amplifier exhibits an open-loop gain independent of the parasitic input capacitance-mostly associated with the MEMS layout-representing an advantage in MEMS testing compared to other alternatives such as Pierce oscillator schemes. The work presented includes the characterization of three types of MEMS resonators that have been fabricated and experimentally characterized both in open-loop and self-sustained configurations using the integrated TIA amplifier. The experimental characterization includes an accurate extraction of the electromechanical parameters for the three fabricated structures that enables an accurate MEMS-CMOS circuitry co-design.MDPI20212021-01-0120212021-01-01research articlehttp://purl.org/coar/resource_type/c_2df8fbb1info:eu-repo/semantics/articleapplication/pdfhttps://hdl.handle.net/20.500.13003/10997reponame:Docusalutinstname:Conselleria de Salut i Consum del Govern de les Illes BalearsInglésengopen accesshttp://purl.org/coar/access_right/c_abf2Attribution 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/info:eu-repo/semantics/openAccessoai:docusalut.com:20.500.13003/109972026-06-22T12:44:07Z
dc.title.none.fl_str_mv A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
title A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
spellingShingle A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
Perello-Roig, Rafel
transimpedance amplifier
RF MEMS
oscillator
CMOS-MEMS
title_short A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
title_full A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
title_fullStr A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
title_full_unstemmed A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
title_sort A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
dc.creator.none.fl_str_mv Perello-Roig, Rafel
Verd, Jaume
Bota, Sebastia
Segura, Jaume
author Perello-Roig, Rafel
author_facet Perello-Roig, Rafel
Verd, Jaume
Bota, Sebastia
Segura, Jaume
author_role author
author2 Verd, Jaume
Bota, Sebastia
Segura, Jaume
author2_role author
author
author
dc.contributor.none.fl_str_mv
dc.subject.none.fl_str_mv transimpedance amplifier
RF MEMS
oscillator
CMOS-MEMS
topic transimpedance amplifier
RF MEMS
oscillator
CMOS-MEMS
description CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical performance otherwise achieved by specific technologies, requiring a challenging readout circuitry. This paper presents a transimpedance amplifier (TIA) fabricated using a commercial 0.35-mu m CMOS technology specifically oriented to drive and sense monolithically integrated CMOS-MEMS resonators up to 50 MHz with a tunable transimpedance gain ranging from 112 dB to 121 dB. The output voltage noise is as low as 225 nV/Hz(1/2)-input-referred current noise of 192 fA/Hz(1/2)-at 10 MHz, and the power consumption is kept below 1-mW. In addition, the TIA amplifier exhibits an open-loop gain independent of the parasitic input capacitance-mostly associated with the MEMS layout-representing an advantage in MEMS testing compared to other alternatives such as Pierce oscillator schemes. The work presented includes the characterization of three types of MEMS resonators that have been fabricated and experimentally characterized both in open-loop and self-sustained configurations using the integrated TIA amplifier. The experimental characterization includes an accurate extraction of the electromechanical parameters for the three fabricated structures that enables an accurate MEMS-CMOS circuitry co-design.
publishDate 2021
dc.date.none.fl_str_mv 2021
2021-01-01
2021
2021-01-01
dc.type.none.fl_str_mv research article
http://purl.org/coar/resource_type/c_2df8fbb1
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://hdl.handle.net/20.500.13003/10997
url https://hdl.handle.net/20.500.13003/10997
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv MDPI
publisher.none.fl_str_mv MDPI
dc.source.none.fl_str_mv reponame:Docusalut
instname:Conselleria de Salut i Consum del Govern de les Illes Balears
instname_str Conselleria de Salut i Consum del Govern de les Illes Balears
reponame_str Docusalut
collection Docusalut
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15.811543

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