High aspect-ratio sub-500 nm UV-PDMS bilayer stamps by means of hybrid thermal-ultraviolet curing for resonant nanopillars fabrication through soft UV-NIL
| Autores: | , , , |
|---|---|
| Tipo de recurso: | artículo |
| Fecha de publicación: | 2023 |
| País: | España |
| Institución: | Universidad Politécnica de Madrid |
| Repositorio: | Archivo Digital UPM |
| OAI Identifier: | oai:oa.upm.es:94420 |
| Acceso en línea: | https://oa.upm.es/94420/ |
| Access Level: | acceso abierto |
| Palabra clave: | arrays Degradation IMPRINT MOLD RELEASE Nanoholes Nanopillars Performance RNPs Soft UV-NIL UV-PDMS NANOHOLES nanopillars NIL Silicon Dioxide |
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ES_a8515ac489a476e2b68aff3f19a135b8 |
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oai:oa.upm.es:94420 |
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ES |
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España |
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| spelling |
High aspect-ratio sub-500 nm UV-PDMS bilayer stamps by means of hybrid thermal-ultraviolet curing for resonant nanopillars fabrication through soft UV-NILTramarin, Luca|||0000-0001-5801-8658Casquel del Campo, Rafael|||0000-0003-2433-9159Mañueco Rubio, IñigoHolgado Bolaños, Miguel|||0000-0001-9299-1371arraysDegradationIMPRINTMOLD RELEASENanoholesNanopillarsPerformanceRNPsSoft UV-NILUV-PDMSNANOHOLESnanopillarsNILRNPsSilicon DioxideSoft UV-NILUV-PDMS20232023-10-15journal articlehttp://purl.org/coar/resource_type/c_6501info:eu-repo/semantics/articlehttps://oa.upm.es/94420/reponame:Archivo Digital UPMinstname:Universidad Politécnica de MadridInglésenopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:oa.upm.es:944202026-06-21T12:45:07Z |
| dc.title.none.fl_str_mv |
High aspect-ratio sub-500 nm UV-PDMS bilayer stamps by means of hybrid thermal-ultraviolet curing for resonant nanopillars fabrication through soft UV-NIL |
| title |
High aspect-ratio sub-500 nm UV-PDMS bilayer stamps by means of hybrid thermal-ultraviolet curing for resonant nanopillars fabrication through soft UV-NIL |
| spellingShingle |
High aspect-ratio sub-500 nm UV-PDMS bilayer stamps by means of hybrid thermal-ultraviolet curing for resonant nanopillars fabrication through soft UV-NIL Tramarin, Luca|||0000-0001-5801-8658 arrays Degradation IMPRINT MOLD RELEASE Nanoholes Nanopillars Performance RNPs Soft UV-NIL UV-PDMS NANOHOLES nanopillars NIL RNPs Silicon Dioxide Soft UV-NIL UV-PDMS |
| title_short |
High aspect-ratio sub-500 nm UV-PDMS bilayer stamps by means of hybrid thermal-ultraviolet curing for resonant nanopillars fabrication through soft UV-NIL |
| title_full |
High aspect-ratio sub-500 nm UV-PDMS bilayer stamps by means of hybrid thermal-ultraviolet curing for resonant nanopillars fabrication through soft UV-NIL |
| title_fullStr |
High aspect-ratio sub-500 nm UV-PDMS bilayer stamps by means of hybrid thermal-ultraviolet curing for resonant nanopillars fabrication through soft UV-NIL |
| title_full_unstemmed |
High aspect-ratio sub-500 nm UV-PDMS bilayer stamps by means of hybrid thermal-ultraviolet curing for resonant nanopillars fabrication through soft UV-NIL |
| title_sort |
High aspect-ratio sub-500 nm UV-PDMS bilayer stamps by means of hybrid thermal-ultraviolet curing for resonant nanopillars fabrication through soft UV-NIL |
| dc.creator.none.fl_str_mv |
Tramarin, Luca|||0000-0001-5801-8658 Casquel del Campo, Rafael|||0000-0003-2433-9159 Mañueco Rubio, Iñigo Holgado Bolaños, Miguel|||0000-0001-9299-1371 |
| author |
Tramarin, Luca|||0000-0001-5801-8658 |
| author_facet |
Tramarin, Luca|||0000-0001-5801-8658 Casquel del Campo, Rafael|||0000-0003-2433-9159 Mañueco Rubio, Iñigo Holgado Bolaños, Miguel|||0000-0001-9299-1371 |
| author_role |
author |
| author2 |
Casquel del Campo, Rafael|||0000-0003-2433-9159 Mañueco Rubio, Iñigo Holgado Bolaños, Miguel|||0000-0001-9299-1371 |
| author2_role |
author author author |
| dc.subject.none.fl_str_mv |
arrays Degradation IMPRINT MOLD RELEASE Nanoholes Nanopillars Performance RNPs Soft UV-NIL UV-PDMS NANOHOLES nanopillars NIL RNPs Silicon Dioxide Soft UV-NIL UV-PDMS |
| topic |
arrays Degradation IMPRINT MOLD RELEASE Nanoholes Nanopillars Performance RNPs Soft UV-NIL UV-PDMS NANOHOLES nanopillars NIL RNPs Silicon Dioxide Soft UV-NIL UV-PDMS |
| publishDate |
2023 |
| dc.date.none.fl_str_mv |
2023 2023-10-15 |
| dc.type.none.fl_str_mv |
journal article http://purl.org/coar/resource_type/c_6501 |
| dc.type.openaire.fl_str_mv |
info:eu-repo/semantics/article |
| format |
article |
| dc.identifier.none.fl_str_mv |
https://oa.upm.es/94420/ |
| url |
https://oa.upm.es/94420/ |
| dc.language.none.fl_str_mv |
Inglés en |
| language_invalid_str_mv |
Inglés en |
| dc.rights.none.fl_str_mv |
open access http://purl.org/coar/access_right/c_abf2 |
| dc.rights.openaire.fl_str_mv |
info:eu-repo/semantics/openAccess |
| rights_invalid_str_mv |
open access http://purl.org/coar/access_right/c_abf2 |
| eu_rights_str_mv |
openAccess |
| dc.source.none.fl_str_mv |
reponame:Archivo Digital UPM instname:Universidad Politécnica de Madrid |
| instname_str |
Universidad Politécnica de Madrid |
| reponame_str |
Archivo Digital UPM |
| collection |
Archivo Digital UPM |
| repository.name.fl_str_mv |
|
| repository.mail.fl_str_mv |
|
| _version_ |
1869415869282516992 |
| score |
15,811543 |