Comparison between optical techniques and confocal microscopy for defect detection on thin wires

Conventional microscopy techniques, such as atomic force microscopy (AFM), scanning electron microscopy (SEM), and confocal microscopy (CM) are not suitable for on-line surface inspection of fine metallic wires. In the recent years, some optical techniques have been developed to be used for those ta...

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Detalles Bibliográficos
Autores: Siegmann, Philip, Sánchez Brea, Luis Miguel, Martínez Antón, Juan Carlos, Bernabeu Martínez, Eusebio
Tipo de recurso: artículo
Fecha de publicación:2004
País:España
Institución:Universidad Complutense de Madrid (UCM)
Repositorio:Docta Complutense
Idioma:inglés
OAI Identifier:oai:docta.ucm.es:20.500.14352/51200
Acceso en línea:https://hdl.handle.net/20.500.14352/51200
Access Level:acceso abierto
Palabra clave:535
Surface-Deffects
Óptica (Física)
2209.19 Óptica Física
Descripción
Sumario:Conventional microscopy techniques, such as atomic force microscopy (AFM), scanning electron microscopy (SEM), and confocal microscopy (CM) are not suitable for on-line surface inspection of fine metallic wires. In the recent years, some optical techniques have been developed to be used for those tasks. However, they need a rigorous validation. In this work, we have used confocal microscopy to obtain the topography z(x,y) of wires with longitudinal defects, such as dielines. The topography has been used to predict the light scattered by the wire. These simulations have been compared with experimental results, showing a good agreement.