Reconfigurable, Temperature Resilient Phase-Change Metasurfaces Fabricated via High Throughput Nanoimprinting Lithography
The combination of metasurfaces with chalcogenide phase-change materials is a highly promising route toward the development of multifunctional and reconfigurable nanophotonic devices. However, their transition into real-world devices is hindered by several technological challenges. This includes, am...
| Autores: | , , , , , , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2026 |
| País: | España |
| Institución: | Consejo Superior de Investigaciones Científicas (CSIC) |
| Repositorio: | DIGITAL.CSIC. Repositorio Institucional del CSIC |
| OAI Identifier: | oai:dnet:digitalcsic_::a8294b303bc153063563ac7165d3533e |
| Acceso en línea: | http://hdl.handle.net/10261/426267 |
| Access Level: | acceso abierto |
| Palabra clave: | Chalcogenide phase‐change materials Chirality Nanoimprint lithography Porous materials Reconfigurable metasurfaces Thin films |
| Sumario: | The combination of metasurfaces with chalcogenide phase-change materials is a highly promising route toward the development of multifunctional and reconfigurable nanophotonic devices. However, their transition into real-world devices is hindered by several technological challenges. This includes, amongst others, the lack of large area photonic architectures produced via scalable nanofabrication methods as required for free-space photonic applications, along with the ability to withstand the high temperatures needed for the phase-change process. In this work, we present a scalable nanofabrication strategy for the production of reconfigurable metasurfaces based on high-throughput, large-area nanoimprint lithography that is fully compatible with chalcogenide phase-change materials processing. Our approach involves the direct imprinting of high-melting-point, thermally stable TiO2 nanoparticle pastes, followed by the deposition of an Sb2Se3 thin film as the phase-change material active layer. The patterned TiO2 film enables the creation of thermally robust metasurfaces, overcoming the limitations of conventional polymer-based nanoimprinting techniques. The versatility of our approach is showcased by producing phase-change devices with two distinct functionalities: (i) metasurfaces with tunable spectral band switching and amplitude modulation capabilities across the near- to mid-infrared, and (ii) reconfigurable chiral metasurfaces, whose chiroptical activity can be switched between the visible and the near-infrared. Experimental results show excellent agreement with numerical simulations and reveal high uniformity across large areas. This work provides a universal, thermally robust and scalable platform for the production of reconfigurable metasurfaces based on phase-change materials, paving the way to low-cost, photonic devices with reconfigurable optical responses that could be extended far beyond the applications demonstrated here. |
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