Graphene patterning by nanosecond laser ablation: the effect of the substrate interaction with graphene

This paper focuses on the development of patterned graphene/substrate by means of green nanosecond pulse laser irradiation. Monolayer graphene samples supported on a Si/SiO2 substrate were patterned using 532 nm laser irradiation under fluence conditions ranging from 31 mJ/cm2 and to 4240 mJ/cm2. Ra...

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Autores: Pérez Mas, Ana Matilde, Álvarez Rodríguez, Patricia, Campos, Nuria, Gómez, David, Menéndez López, Rosa María
Tipo de recurso: artículo
Estado:Versión aceptada para publicación
Fecha de publicación:2016
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/155088
Acceso en línea:http://hdl.handle.net/10261/155088
Access Level:acceso abierto
Palabra clave:CVD Graphene
Laser scribing
Nanosecond laser
Pulsed laser
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spelling Graphene patterning by nanosecond laser ablation: the effect of the substrate interaction with graphenePérez Mas, Ana MatildeÁlvarez Rodríguez, PatriciaCampos, NuriaGómez, DavidMenéndez López, Rosa MaríaCVD GrapheneLaser scribingNanosecond laserPulsed laserThis paper focuses on the development of patterned graphene/substrate by means of green nanosecond pulse laser irradiation. Monolayer graphene samples supported on a Si/SiO2 substrate were patterned using 532 nm laser irradiation under fluence conditions ranging from 31 mJ/cm2 and to 4240 mJ/cm2. Raman spectroscopy was used to investigate the effect of laser irradiation on the graphene. It was found that at 356 mJ/cm2 selective ablation of the graphene occurs. However, at fluence values above 1030 mJ/cm2 (when damage to the substrate is observed) no ablation of the graphene takes place. In contrast, its graphenic structure was found to have been modified. Only at fluence values where the ablation of the substrate occurs, is graphene eliminated in an area almost equivalent to that of the ablated substrate. In this case, additional damage to the graphene sheet edges is produced. The increment in the number of oxygenated functional groups in these regions, as measured by XPS spectroscopy, suggests that this damage is probably caused by thermal phenomena during the ablation of the substrate.The research leading to these results has received funding from the European Union’s Research Fund for Coal and Steel research program under Grant Agreement number RFCR-CT-2013-00006 and the European Union Seventh Framework Programme (FP7/ 2007-2013) under grant agreement nº 600849 (INSIDDE Project). Assistance from the Spanish MINECO (project ref: MAT2013-48107-C3-1-R) and the Principado de Asturias-PCTI (Ramon y Cajal research contract [GRUPINN 14-118] of Dr. P. Álvarez and Severo Ochoa pre-doctoral grant of AM. P. Mas) is also acknowledged.Peer reviewedInstitute of Physics PublishingEuropean CommissionMinisterio de Economía y Competitividad (España)Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]201720172016info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Postprintinfo:eu-repo/semantics/acceptedVersionhttp://hdl.handle.net/10261/155088reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglés#PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE#info:eu-repo/grantAgreement/EC/FP7/600849info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2013-48107-C3-1-Rhttps://doi.org/10.1088/0022-3727/49/30/305301Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/1550882026-05-22T06:33:51Z
dc.title.none.fl_str_mv Graphene patterning by nanosecond laser ablation: the effect of the substrate interaction with graphene
title Graphene patterning by nanosecond laser ablation: the effect of the substrate interaction with graphene
spellingShingle Graphene patterning by nanosecond laser ablation: the effect of the substrate interaction with graphene
Pérez Mas, Ana Matilde
CVD Graphene
Laser scribing
Nanosecond laser
Pulsed laser
title_short Graphene patterning by nanosecond laser ablation: the effect of the substrate interaction with graphene
title_full Graphene patterning by nanosecond laser ablation: the effect of the substrate interaction with graphene
title_fullStr Graphene patterning by nanosecond laser ablation: the effect of the substrate interaction with graphene
title_full_unstemmed Graphene patterning by nanosecond laser ablation: the effect of the substrate interaction with graphene
title_sort Graphene patterning by nanosecond laser ablation: the effect of the substrate interaction with graphene
dc.creator.none.fl_str_mv Pérez Mas, Ana Matilde
Álvarez Rodríguez, Patricia
Campos, Nuria
Gómez, David
Menéndez López, Rosa María
author Pérez Mas, Ana Matilde
author_facet Pérez Mas, Ana Matilde
Álvarez Rodríguez, Patricia
Campos, Nuria
Gómez, David
Menéndez López, Rosa María
author_role author
author2 Álvarez Rodríguez, Patricia
Campos, Nuria
Gómez, David
Menéndez López, Rosa María
author2_role author
author
author
author
dc.contributor.none.fl_str_mv European Commission
Ministerio de Economía y Competitividad (España)
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv CVD Graphene
Laser scribing
Nanosecond laser
Pulsed laser
topic CVD Graphene
Laser scribing
Nanosecond laser
Pulsed laser
description This paper focuses on the development of patterned graphene/substrate by means of green nanosecond pulse laser irradiation. Monolayer graphene samples supported on a Si/SiO2 substrate were patterned using 532 nm laser irradiation under fluence conditions ranging from 31 mJ/cm2 and to 4240 mJ/cm2. Raman spectroscopy was used to investigate the effect of laser irradiation on the graphene. It was found that at 356 mJ/cm2 selective ablation of the graphene occurs. However, at fluence values above 1030 mJ/cm2 (when damage to the substrate is observed) no ablation of the graphene takes place. In contrast, its graphenic structure was found to have been modified. Only at fluence values where the ablation of the substrate occurs, is graphene eliminated in an area almost equivalent to that of the ablated substrate. In this case, additional damage to the graphene sheet edges is produced. The increment in the number of oxygenated functional groups in these regions, as measured by XPS spectroscopy, suggests that this damage is probably caused by thermal phenomena during the ablation of the substrate.
publishDate 2016
dc.date.none.fl_str_mv 2016
2017
2017
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Postprint
info:eu-repo/semantics/acceptedVersion
format article
status_str acceptedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/155088
url http://hdl.handle.net/10261/155088
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv #PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
info:eu-repo/grantAgreement/EC/FP7/600849
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2013-48107-C3-1-R
https://doi.org/10.1088/0022-3727/49/30/305301
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Institute of Physics Publishing
publisher.none.fl_str_mv Institute of Physics Publishing
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,811543

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