Double grating systems with one steel tape grating

Steel tape gratings are used in different metrology applications. As the period of these gratings was large (around 100μm,), its analytical study has been performed, up to date, using a geometrical approach. Nowadays, steel tape gratings can be manufactured with lower periods, around 20–40 μm, and d...

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Detalles Bibliográficos
Autores: Torcal Milla, Francisco José, Sánchez Brea, Luis Miguel, Bernabeu Martínez, Eusebio
Tipo de recurso: artículo
Fecha de publicación:2008
País:España
Institución:Universidad Complutense de Madrid (UCM)
Repositorio:Docta Complutense
Idioma:inglés
OAI Identifier:oai:docta.ucm.es:20.500.14352/51152
Acceso en línea:https://hdl.handle.net/20.500.14352/51152
Access Level:acceso abierto
Palabra clave:535
LAU
Interferometer
Illumination
Óptica (Física)
2209.19 Óptica Física
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oai_identifier_str oai:docta.ucm.es:20.500.14352/51152
network_acronym_str ES
network_name_str España
repository_id_str
spelling Double grating systems with one steel tape gratingTorcal Milla, Francisco JoséSánchez Brea, Luis MiguelBernabeu Martínez, Eusebio535LAUInterferometerIlluminationÓptica (Física)2209.19 Óptica FísicaSteel tape gratings are used in different metrology applications. As the period of these gratings was large (around 100μm,), its analytical study has been performed, up to date, using a geometrical approach. Nowadays, steel tape gratings can be manufactured with lower periods, around 20–40 μm, and diffractive effects must be taken into account. Also, due to the roughness of the surface, statistical techniques need to be considered to analyze their behavior. In this work, an analysis of the pseudo-imaging formation in a double grating system including one steel tape grating is performed. In particular Moiré and Lau configurations are analyzed. We have found that roughness significantly affects to Moiré configuration. However, its effect is negligible in Lau configuration. Generalized grating imaging configuration is also studied in depth. It is shown that roughness does not affect to the contrast of pseudoimages, but it modifies their depth of focus.Elsevier Science BVUniversidad Complutense de Madrid20082008-12-0120082008-12-01journal articlehttp://purl.org/coar/resource_type/c_6501info:eu-repo/semantics/articleapplication/pdfhttps://hdl.handle.net/20.500.14352/51152reponame:Docta Complutenseinstname:Universidad Complutense de Madrid (UCM)Inglésengopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:docta.ucm.es:20.500.14352/511522026-06-02T12:44:21Z
dc.title.none.fl_str_mv Double grating systems with one steel tape grating
title Double grating systems with one steel tape grating
spellingShingle Double grating systems with one steel tape grating
Torcal Milla, Francisco José
535
LAU
Interferometer
Illumination
Óptica (Física)
2209.19 Óptica Física
title_short Double grating systems with one steel tape grating
title_full Double grating systems with one steel tape grating
title_fullStr Double grating systems with one steel tape grating
title_full_unstemmed Double grating systems with one steel tape grating
title_sort Double grating systems with one steel tape grating
dc.creator.none.fl_str_mv Torcal Milla, Francisco José
Sánchez Brea, Luis Miguel
Bernabeu Martínez, Eusebio
author Torcal Milla, Francisco José
author_facet Torcal Milla, Francisco José
Sánchez Brea, Luis Miguel
Bernabeu Martínez, Eusebio
author_role author
author2 Sánchez Brea, Luis Miguel
Bernabeu Martínez, Eusebio
author2_role author
author
dc.contributor.none.fl_str_mv Universidad Complutense de Madrid
dc.subject.none.fl_str_mv 535
LAU
Interferometer
Illumination
Óptica (Física)
2209.19 Óptica Física
topic 535
LAU
Interferometer
Illumination
Óptica (Física)
2209.19 Óptica Física
description Steel tape gratings are used in different metrology applications. As the period of these gratings was large (around 100μm,), its analytical study has been performed, up to date, using a geometrical approach. Nowadays, steel tape gratings can be manufactured with lower periods, around 20–40 μm, and diffractive effects must be taken into account. Also, due to the roughness of the surface, statistical techniques need to be considered to analyze their behavior. In this work, an analysis of the pseudo-imaging formation in a double grating system including one steel tape grating is performed. In particular Moiré and Lau configurations are analyzed. We have found that roughness significantly affects to Moiré configuration. However, its effect is negligible in Lau configuration. Generalized grating imaging configuration is also studied in depth. It is shown that roughness does not affect to the contrast of pseudoimages, but it modifies their depth of focus.
publishDate 2008
dc.date.none.fl_str_mv 2008
2008-12-01
2008
2008-12-01
dc.type.none.fl_str_mv journal article
http://purl.org/coar/resource_type/c_6501
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://hdl.handle.net/20.500.14352/51152
url https://hdl.handle.net/20.500.14352/51152
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier Science BV
publisher.none.fl_str_mv Elsevier Science BV
dc.source.none.fl_str_mv reponame:Docta Complutense
instname:Universidad Complutense de Madrid (UCM)
instname_str Universidad Complutense de Madrid (UCM)
reponame_str Docta Complutense
collection Docta Complutense
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,300724

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