Design and prototyping of BEOL-embedded CMOS-MEMS accelerometers
In reference to IEEE copyrighted material which is used with permission in this thesis, the IEEE does not endorse any of Universitat Politècnica de Catalunya's products or services. Internal or personal use of this material is permitted. If interested in reprinting/republishing IEEE copyrighted...
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| Formato: | tesis doctoral |
| Fecha de publicación: | 2015 |
| País: | España |
| Recursos: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglés |
| OAI Identifier: | oai:upcommons.upc.edu:2117/430546 |
| Acesso em linha: | https://hdl.handle.net/2117/430546 https://dx.doi.org/10.5821/dissertation-2117-430546 |
| Access Level: | acceso abierto |
| Palavra-chave: | 621.3 - Enginyeria elèctrica. Electrotècnia. Telecomunicacions Àrees temàtiques de la UPC::Enginyeria electrònica |
| Resumo: | In reference to IEEE copyrighted material which is used with permission in this thesis, the IEEE does not endorse any of Universitat Politècnica de Catalunya's products or services. Internal or personal use of this material is permitted. If interested in reprinting/republishing IEEE copyrighted material for advertising or promotional purposes or for creating new collective works for resale or redistribution, please go to http://www.ieee.org/publications_standards/publications/rights/rights_link.html to learn how to obtain a License from RightsLink. |
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