Enhancement of oxidation rate of a-Si nanoparticles during dehydrogenation
Oxidation of amorphous silicon (a-Si) nanoparticles grown by plasma-enhanced chemical vapor deposition were investigated. Their hydrogen content has a great influence on the oxidation rate at low temperature. When the mass gain is recorded during a heating ramp in dry air, an oxidation process at lo...
| Autores: | , , , , |
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| Tipo de documento: | artigo |
| Data de publicação: | 2001 |
| País: | España |
| Recursos: | Varias* (Consorci de Biblioteques Universitáries de Catalunya, Centre de Serveis Científics i Acadèmics de Catalunya) |
| Repositório: | Recercat. Dipósit de la Recerca de Catalunya |
| OAI Identifier: | oai:recercat.cat:10256/3051 |
| Acesso em linha: | http://hdl.handle.net/10256/3051 |
| Access Level: | Acceso aberto |
| Palavra-chave: | Anàlisi tèrmica Hidrogenació Semiconductors amorfs Silici -- Oxidació Materials nanoestructurals Amorphous semiconductors Hydrogenation Nanostructure materials Silicon -- Oxidation Thermal analysis |
| Resumo: | Oxidation of amorphous silicon (a-Si) nanoparticles grown by plasma-enhanced chemical vapor deposition were investigated. Their hydrogen content has a great influence on the oxidation rate at low temperature. When the mass gain is recorded during a heating ramp in dry air, an oxidation process at low temperature is identified with an onset around 250°C. This temperature onset is similar to that of hydrogen desorption. It is shown that the oxygen uptake during this process almost equals the number of hydrogen atoms present in the nanoparticles. To explain this correlation, we propose that oxidation at low temperature is triggered by the process of hydrogen desorption |
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