Conformal TiO2 Aerogel-Like Films by Plasma Deposition: fromOmniphobic Antireflective Coatings to Perovskite Solar CellPhotoelectrodes
he ability to control the porosity of thin oxide films is akey factor determining their properties. Despite the abundance of dryprocesses for synthesizing oxide porous layers, a high porosity range istypically achieved by spin-coating-based wet chemical methods. Besides,special techniques such as su...
| Autores: | , , , , , , , , , , , , , |
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| Tipo de documento: | artigo |
| Estado: | Versão publicada |
| Data de publicação: | 2024 |
| País: | España |
| Recursos: | Consejo Superior de Investigaciones Científicas (CSIC) |
| Repositório: | DIGITAL.CSIC. Repositorio Institucional del CSIC |
| OAI Identifier: | oai:digital.csic.es:10261/366423 |
| Acesso em linha: | http://hdl.handle.net/10261/366423 |
| Access Level: | Acceso aberto |
| Palavra-chave: | Aerogel-like coating Plasma deposition Omniphobic films Antireflective films Perovskite solar cells Ttitanium dioxide http://metadata.un.org/sdg/7 Ensure access to affordable, reliable, sustainable and modern energy for all |
| Resumo: | he ability to control the porosity of thin oxide films is akey factor determining their properties. Despite the abundance of dryprocesses for synthesizing oxide porous layers, a high porosity range istypically achieved by spin-coating-based wet chemical methods. Besides,special techniques such as supercritical drying are required to replace thepore liquid with air while maintaining the porous network. In this study,we propose a new method for the fabrication of ultraporous titaniumdioxide thin films at room or mild temperatures (T ≤ 120 °C) by asequential process involving plasma deposition and etching. These filmsare conformal to the substrate topography even for high-aspect-ratiosubstrates and show percolated porosity values above 85% that arecomparable to those of advanced aerogels. The films deposited at roomtemperature are amorphous. However, they become partly crystalline atslightly higher temperatures, presenting a distribution of anatase clusters embedded in the sponge-like open porous structure.Surprisingly, the porous structure remains after annealing the films at 450 °C in air, which increases the fraction of embeddedanatase nanocrystals. The films are antireflective, omniphobic, and photoactive, becoming superhydrophilic when subjected toultraviolet light irradiation. The supported, percolated, and nanoporous structure can be used as an electron-conducting electrode inperovskite solar cells. The properties of the cells depend on the aerogel-like film thickness, which reaches efficiencies close to thoseof commercial mesoporous anatase electrodes. This generic solvent-free synthesis is scalable and applicable to ultrahigh porousconformal oxides of different compositions, with potential applications in photonics, optoelectronics, energy storage, and controlledwetting |
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