A flexoelectric microelectromechanical system on silicon
Flexoelectricity allows a dielectric material to polarize in response to a mechanical bending moment and, conversely, to bend in response to an electric field. Compared with piezoelectricity, flexoelectricity is a weak effect of little practical significance in bulk materials. However, the roles can...
| Autores: | , , , , , , |
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| Formato: | artículo |
| Fecha de publicación: | 2016 |
| País: | España |
| Recursos: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglés |
| OAI Identifier: | oai:upcommons.upc.edu:2117/116673 |
| Acesso em linha: | https://hdl.handle.net/2117/116673 https://dx.doi.org/10.1039/C5NR06514C |
| Access Level: | acceso abierto |
| Palavra-chave: | Automatic control Operations research flexoelectricity MEMS nanoscale piezoelectrics Control automàtic Investigació operativa Classificació AMS::70 Mechanics of particles and systems::70Q05 Control of mechanical systems Classificació AMS::90 Operations research, mathematical programming::90B Operations research and management science Àrees temàtiques de la UPC::Matemàtiques i estadística::Matemàtica aplicada a les ciències Àrees temàtiques de la UPC::Matemàtiques i estadística::Investigació operativa::Optimització |
| Resumo: | Flexoelectricity allows a dielectric material to polarize in response to a mechanical bending moment and, conversely, to bend in response to an electric field. Compared with piezoelectricity, flexoelectricity is a weak effect of little practical significance in bulk materials. However, the roles can be reversed at the nanoscale. Here, we demonstrate that flexoelectricity is a viable route to lead-free microelectromechanical and nanoelectromechanical systems. Specifically, we have fabricated a silicon-compatible thin-film cantilever actuator with a single flexoelectrically active layer of strontium titanate with a figure of merit (curvature divided by electric field) of 3.33 MV-1, comparable to that of state-of-the-art piezoelectric bimorph cantilevers. |
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