Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum

Chemicals and CAS Registry Numbers cobalt 7440-48-4 helium 7440-59-7 silicon 7440-21-3 zirconium 14940-68-2, 7440-67-7

Detalhes bibliográficos
Autores: Fernández-Camacho, A., de Haro, M Carmen Jiménez, Hufschmidt, Dirk, Montes, Olga, Sauvage, Thierry, Ferrer, F Javier, Caillard, Amaël, Brault, Pascal, Thomann, Anne-Lise
Formato: artículo
Estado:Versión publicada
Fecha de publicación:2025
País:España
Recursos:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/398642
Acesso em linha:http://hdl.handle.net/10261/398642
https://api.elsevier.com/content/abstract/scopus_id/105009542761
Access Level:acceso abierto
Palavra-chave:Si and Zr
4He and 3He charged thin films
Helium assisted magnetron sputtering of Co
Helium release by thermal annealing
IBA analysis
Microstructural characterization
Nanobubbles and nanopores
id ES_8d8dcb70ac8163473ec2c73214c0cf14
oai_identifier_str oai:digital.csic.es:10261/398642
network_acronym_str ES
network_name_str España
repository_id_str
spelling Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuumFernández-Camacho, A.de Haro, M Carmen JiménezHufschmidt, DirkMontes, OlgaSauvage, ThierryFerrer, F JavierCaillard, AmaëlBrault, PascalThomann, Anne-LiseSi and Zr4He and 3He charged thin filmsHelium assisted magnetron sputtering of CoHelium release by thermal annealingIBA analysisMicrostructural characterizationNanobubbles and nanoporesChemicals and CAS Registry Numbers cobalt 7440-48-4 helium 7440-59-7 silicon 7440-21-3 zirconium 14940-68-2, 7440-67-7Sputtering of cobalt, silicon and zirconium in a helium magnetron discharge (MS) is reported as a bottom-up procedure to obtain He-charged films (i.e. 4He and 3He filled nanopores encapsulated in the matrix material). Composition and microstructural analyses are presented from ion beam analysis (IBA) and scanning and transmission electron microscopies (SEM and TEM). Helium desorption was investigated by IBA in a dedicated chamber for "in situ" thermal evolution in vacuum. The simultaneous recording of the helium and matrix-element signals shows different behaviors of the different matrix elements (i.e. Co, Si and Zr) and deposition conditions (i.e., DC or RF discharge modes and dynamic or quasistatic vacuum). Effusion, blistering, delamination and flaking have been observed for the different samples leading to the formation of nano-porous/nanostructured thin films. The methodology is being envisaged as a process for nanostructured thin-films fabrication with potential applications.We acknowledge the assistance of I. Rosa for the cross-section TEM lamellas preparation and Olivier Wendling for technical support during IBA analyses.Peer reviewedNature Publishing GroupFernández, Asunción [0000-0002-7487-7054]Jiménez- de Haro, M. Carmen [0000-0003-1850-8091]Hufschmidt, Dirk [0000-0001-8189-4656]Montes, Olga [0000-0001-7778-5713]Sauvage, Thierry [0000-0001-8100-2187]Ferrer, F. Javier [0000-0003-1840-2553]Caillard, Amaël [0000-0001-9540-1381]Brault, Pascal [0000-0002-8380-480X]Thomann, Anne-Lise [0000-0002-8524-9694]Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]202520252025info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://hdl.handle.net/10261/398642https://api.elsevier.com/content/abstract/scopus_id/105009542761reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Ingléshttps://doi.org/10.1038/s41598-025-06889-8Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/3986422026-05-22T06:33:51Z
dc.title.none.fl_str_mv Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum
title Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum
spellingShingle Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum
Fernández-Camacho, A.
Si and Zr
4He and 3He charged thin films
Helium assisted magnetron sputtering of Co
Helium release by thermal annealing
IBA analysis
Microstructural characterization
Nanobubbles and nanopores
title_short Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum
title_full Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum
title_fullStr Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum
title_full_unstemmed Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum
title_sort Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum
dc.creator.none.fl_str_mv Fernández-Camacho, A.
de Haro, M Carmen Jiménez
Hufschmidt, Dirk
Montes, Olga
Sauvage, Thierry
Ferrer, F Javier
Caillard, Amaël
Brault, Pascal
Thomann, Anne-Lise
author Fernández-Camacho, A.
author_facet Fernández-Camacho, A.
de Haro, M Carmen Jiménez
Hufschmidt, Dirk
Montes, Olga
Sauvage, Thierry
Ferrer, F Javier
Caillard, Amaël
Brault, Pascal
Thomann, Anne-Lise
author_role author
author2 de Haro, M Carmen Jiménez
Hufschmidt, Dirk
Montes, Olga
Sauvage, Thierry
Ferrer, F Javier
Caillard, Amaël
Brault, Pascal
Thomann, Anne-Lise
author2_role author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Fernández, Asunción [0000-0002-7487-7054]
Jiménez- de Haro, M. Carmen [0000-0003-1850-8091]
Hufschmidt, Dirk [0000-0001-8189-4656]
Montes, Olga [0000-0001-7778-5713]
Sauvage, Thierry [0000-0001-8100-2187]
Ferrer, F. Javier [0000-0003-1840-2553]
Caillard, Amaël [0000-0001-9540-1381]
Brault, Pascal [0000-0002-8380-480X]
Thomann, Anne-Lise [0000-0002-8524-9694]
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Si and Zr
4He and 3He charged thin films
Helium assisted magnetron sputtering of Co
Helium release by thermal annealing
IBA analysis
Microstructural characterization
Nanobubbles and nanopores
topic Si and Zr
4He and 3He charged thin films
Helium assisted magnetron sputtering of Co
Helium release by thermal annealing
IBA analysis
Microstructural characterization
Nanobubbles and nanopores
description Chemicals and CAS Registry Numbers cobalt 7440-48-4 helium 7440-59-7 silicon 7440-21-3 zirconium 14940-68-2, 7440-67-7
publishDate 2025
dc.date.none.fl_str_mv 2025
2025
2025
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Publisher's version
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/398642
https://api.elsevier.com/content/abstract/scopus_id/105009542761
url http://hdl.handle.net/10261/398642
https://api.elsevier.com/content/abstract/scopus_id/105009542761
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv https://doi.org/10.1038/s41598-025-06889-8
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Nature Publishing Group
publisher.none.fl_str_mv Nature Publishing Group
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869413055544164352
score 15.812429

Registos relacionados