Application of the level set method for the visual representation of continuous cellular automata oriented to anisotropic wet etching

[EN] Atomistic models are a very valuable simulation tool in the field of material science. Among them are the continuous cellular automata (CCA), which can simulate accurately the process of chemical etching used in micro-electro-mechanical-systems (MEMS) micromachining. Due to the CCA intrinsic at...

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Autores: Montoliu Álvaro, Carles, Ferrando Jódar, Néstor, Cerdá Boluda, Joaquín|||0000-0002-6649-298X, Colom Palero, Ricardo José|||0000-0003-0704-4906
Formato: artículo
Fecha de publicación:2014
País:España
Recursos:Universitat Politècnica de València (UPV)
Repositorio:RiuNet. Repositorio Institucional de la Universitat Politécnica de Valéncia
Idioma:inglés
OAI Identifier:oai:riunet.upv.es:10251/65697
Acesso em linha:https://riunet.upv.es/handle/10251/65697
Access Level:acceso abierto
Palavra-chave:Level set
Cellular automata
Surface reconstruction
MEMS
68N01
68N30
TECNOLOGIA ELECTRONICA
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spelling Application of the level set method for the visual representation of continuous cellular automata oriented to anisotropic wet etchingMontoliu Álvaro, CarlesFerrando Jódar, NéstorCerdá Boluda, Joaquín|||0000-0002-6649-298XColom Palero, Ricardo José|||0000-0003-0704-4906Level setCellular automataSurface reconstructionMEMS68N0168N30TECNOLOGIA ELECTRONICA[EN] Atomistic models are a very valuable simulation tool in the field of material science. Among them are the continuous cellular automata (CCA), which can simulate accurately the process of chemical etching used in micro-electro-mechanical-systems (MEMS) micromachining. Due to the CCA intrinsic atomistic nature, simulation results are obtained in the form of a cloud of points, so data visualization has been usually problematic. When using these models as a part of a computer aided design tool, good data visualization is very important. In this paper, a minimum energy model implemented with the level set (LS) method for improving the visual representation of simulated MEMS is presented. Additionally, the sparse field method has been applied to reduce the high computational cost of the original LS. Finally, some reconstructed surfaces with completely different topologies are presented, proving the effectiveness of our implementation and the fact that it is capable of producing any real surface, flat and smooth ones.We thank Miguel Angel Gosalvez for his collaboration in the early stages of this research. This work has been supported by the Spanish FPI-MICINN BES-2011-045940 grant. Also, we acknowledge support by the JAE-Doc grant form the Junta para la Ampliacion de Estudios program co-funded by FSE.Taylor & Francis (Routledge): STM, Behavioural Science and Public Health TitlesDepartamento de Ingeniería ElectrónicaEscuela Técnica Superior de Ingeniería de TelecomunicaciónInstituto de Instrumentación para Imagen MolecularMinisterio de Ciencia e InnovaciónRepositorio Institucional de la Universitat Politècnica de València Riunet20142014-01-02journal articlehttp://purl.org/coar/resource_type/c_6501VoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85info:eu-repo/semantics/articleapplication/pdfapplication/pdfhttps://riunet.upv.es/handle/10251/65697reponame:RiuNet. Repositorio Institucional de la Universitat Politécnica de Valénciainstname:Universitat Politècnica de València (UPV)InglésengMinisterio de Ciencia e Innovación http://dx.doi.org/10.13039/501100004837 BES-2011-045940 BES-2011-045940open accesshttp://purl.org/coar/access_right/c_abf2Reserva de todos los derechoshttp://rightsstatements.org/vocab/InC/1.0/info:eu-repo/semantics/openAccessoai:riunet.upv.es:10251/656972026-06-13T07:49:27Z
dc.title.none.fl_str_mv Application of the level set method for the visual representation of continuous cellular automata oriented to anisotropic wet etching
title Application of the level set method for the visual representation of continuous cellular automata oriented to anisotropic wet etching
spellingShingle Application of the level set method for the visual representation of continuous cellular automata oriented to anisotropic wet etching
Montoliu Álvaro, Carles
Level set
Cellular automata
Surface reconstruction
MEMS
68N01
68N30
TECNOLOGIA ELECTRONICA
title_short Application of the level set method for the visual representation of continuous cellular automata oriented to anisotropic wet etching
title_full Application of the level set method for the visual representation of continuous cellular automata oriented to anisotropic wet etching
title_fullStr Application of the level set method for the visual representation of continuous cellular automata oriented to anisotropic wet etching
title_full_unstemmed Application of the level set method for the visual representation of continuous cellular automata oriented to anisotropic wet etching
title_sort Application of the level set method for the visual representation of continuous cellular automata oriented to anisotropic wet etching
dc.creator.none.fl_str_mv Montoliu Álvaro, Carles
Ferrando Jódar, Néstor
Cerdá Boluda, Joaquín|||0000-0002-6649-298X
Colom Palero, Ricardo José|||0000-0003-0704-4906
author Montoliu Álvaro, Carles
author_facet Montoliu Álvaro, Carles
Ferrando Jódar, Néstor
Cerdá Boluda, Joaquín|||0000-0002-6649-298X
Colom Palero, Ricardo José|||0000-0003-0704-4906
author_role author
author2 Ferrando Jódar, Néstor
Cerdá Boluda, Joaquín|||0000-0002-6649-298X
Colom Palero, Ricardo José|||0000-0003-0704-4906
author2_role author
author
author
dc.contributor.none.fl_str_mv Departamento de Ingeniería Electrónica
Escuela Técnica Superior de Ingeniería de Telecomunicación
Instituto de Instrumentación para Imagen Molecular
Ministerio de Ciencia e Innovación
Repositorio Institucional de la Universitat Politècnica de València Riunet
dc.subject.none.fl_str_mv Level set
Cellular automata
Surface reconstruction
MEMS
68N01
68N30
TECNOLOGIA ELECTRONICA
topic Level set
Cellular automata
Surface reconstruction
MEMS
68N01
68N30
TECNOLOGIA ELECTRONICA
description [EN] Atomistic models are a very valuable simulation tool in the field of material science. Among them are the continuous cellular automata (CCA), which can simulate accurately the process of chemical etching used in micro-electro-mechanical-systems (MEMS) micromachining. Due to the CCA intrinsic atomistic nature, simulation results are obtained in the form of a cloud of points, so data visualization has been usually problematic. When using these models as a part of a computer aided design tool, good data visualization is very important. In this paper, a minimum energy model implemented with the level set (LS) method for improving the visual representation of simulated MEMS is presented. Additionally, the sparse field method has been applied to reduce the high computational cost of the original LS. Finally, some reconstructed surfaces with completely different topologies are presented, proving the effectiveness of our implementation and the fact that it is capable of producing any real surface, flat and smooth ones.
publishDate 2014
dc.date.none.fl_str_mv 2014
2014-01-02
dc.type.none.fl_str_mv journal article
http://purl.org/coar/resource_type/c_6501
VoR
http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://riunet.upv.es/handle/10251/65697
url https://riunet.upv.es/handle/10251/65697
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.relation.none.fl_str_mv Ministerio de Ciencia e Innovación http://dx.doi.org/10.13039/501100004837 BES-2011-045940 BES-2011-045940
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
Reserva de todos los derechos
http://rightsstatements.org/vocab/InC/1.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
Reserva de todos los derechos
http://rightsstatements.org/vocab/InC/1.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Taylor & Francis (Routledge): STM, Behavioural Science and Public Health Titles
publisher.none.fl_str_mv Taylor & Francis (Routledge): STM, Behavioural Science and Public Health Titles
dc.source.none.fl_str_mv reponame:RiuNet. Repositorio Institucional de la Universitat Politécnica de Valéncia
instname:Universitat Politècnica de València (UPV)
instname_str Universitat Politècnica de València (UPV)
reponame_str RiuNet. Repositorio Institucional de la Universitat Politécnica de Valéncia
collection RiuNet. Repositorio Institucional de la Universitat Politécnica de Valéncia
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,300724

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