Integration of Sm2Co17 Micromagnets in a Ferromagnetic Multipolar Microrotor to Enhance MEMS and Micromotor Performance
MEMS and micromotors may benefit from the increasing complexity of rotors by integrating a larger number of magnetic dipoles. In this article, a new microassembly and bonding process to integrate multiple Sm2Co17 micromagnets in a ferromagnetic core is presented. We experimentally demonstrate the fe...
| Autores: | , , , , , , |
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| Tipo de recurso: | artículo |
| Fecha de publicación: | 2024 |
| País: | España |
| Institución: | Universidad de Alcalá (UAH) |
| Repositorio: | e_Buah Biblioteca Digital Universidad de Alcalá |
| Idioma: | inglés |
| OAI Identifier: | oai:ebuah.uah.es:10017/68597 |
| Acceso en línea: | http://hdl.handle.net/10017/68597 https://dx.doi.org/10.3390/mi15070875 |
| Access Level: | acceso abierto |
| Palabra clave: | Multipolar rotor MEMS Micromagnets Microassembly Micromotors Electrónica Electronics |
| Sumario: | MEMS and micromotors may benefit from the increasing complexity of rotors by integrating a larger number of magnetic dipoles. In this article, a new microassembly and bonding process to integrate multiple Sm2Co17 micromagnets in a ferromagnetic core is presented. We experimentally demonstrate the feasibility of a multipolar micrometric magnetic rotor with 11 magnetic dipoles made of N35 Sm2Co17 micromagnets (length below 250 mu m and thickness of 65 mu m), integrated on a ferromagnetic core. We explain the micromanufacturing methods and the multistep microassembly process. The core is manufactured on ferromagnetic alloy Fe49Co49V2 and has an external diameter of 800 mu m and a thickness of 200 mu m. Magnetic and geometric measurements show good geometric fitting and planarity. The manufactured microrotor also shows good agreement among the magnetic measurements and the magnetic simulations which means that there is no magnetic degradation of the permanent magnet during the manufacturing and assembly process. This technique enables new design possibilities to significantly increase the performance of micromotors or MEMS. |
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