Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

Micro/nanomechanical resonators have been designed and fabricated with the aim to be used as distributed mass sensors for in situ measurement of the thickness of ultra-thin layers. First, we present a comparative study of three kinds of oscillating devices (cantilever, bridge and quad beam). The qua...

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Detalhes bibliográficos
Autores: Arcamone, Julien, Rius, Gemma, Abadal, Gabriel, Teva, Jordi, Barniol, Núria, Perez Murano, Francesc X.
Formato: artículo
Estado:Versión publicada
Fecha de publicación:2006
País:España
Recursos:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/343498
Acesso em linha:http://hdl.handle.net/10261/343498
https://api.elsevier.com/content/abstract/scopus_id/33646028806
Access Level:acceso abierto
Palavra-chave:Capacitive detection | Distributed mass sensing | Monolithic integration | Nano-micromechanical resonators
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spelling Micro/nanomechanical resonators for distributed mass sensing with capacitive detectionArcamone, JulienRius, GemmaAbadal, GabrielTeva, JordiBarniol, NúriaPerez Murano, Francesc X.Capacitive detection | Distributed mass sensing | Monolithic integration | Nano-micromechanical resonatorsMicro/nanomechanical resonators have been designed and fabricated with the aim to be used as distributed mass sensors for in situ measurement of the thickness of ultra-thin layers. First, we present a comparative study of three kinds of oscillating devices (cantilever, bridge and quad beam). The quad beam design has been selected for fabrication because it combines high sensitivity and good electrical response. The complete fabrication process of the device is based on electron beam lithography, lift-off and reactive ion etching. The frequency response has been characterized by means of electrical excitation and capacitive read-out. © 2006 Elsevier B.V. All rights reserved.Peer reviewedElsevierMinisterio de Ciencia y Tecnología (España)European CommissionConsejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]202420242006info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionhttp://hdl.handle.net/10261/343498https://api.elsevier.com/content/abstract/scopus_id/33646028806reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglés#PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE#eu-repo/grantAgreement/EC/FP7/2003-500120eu-repo/grantAgreement/MCYT//TIC2003-07237-C01Microelectronic Engineering10.1016/j.mee.2006.01.177Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/3434982026-05-22T06:33:51Z
dc.title.none.fl_str_mv Micro/nanomechanical resonators for distributed mass sensing with capacitive detection
title Micro/nanomechanical resonators for distributed mass sensing with capacitive detection
spellingShingle Micro/nanomechanical resonators for distributed mass sensing with capacitive detection
Arcamone, Julien
Capacitive detection | Distributed mass sensing | Monolithic integration | Nano-micromechanical resonators
title_short Micro/nanomechanical resonators for distributed mass sensing with capacitive detection
title_full Micro/nanomechanical resonators for distributed mass sensing with capacitive detection
title_fullStr Micro/nanomechanical resonators for distributed mass sensing with capacitive detection
title_full_unstemmed Micro/nanomechanical resonators for distributed mass sensing with capacitive detection
title_sort Micro/nanomechanical resonators for distributed mass sensing with capacitive detection
dc.creator.none.fl_str_mv Arcamone, Julien
Rius, Gemma
Abadal, Gabriel
Teva, Jordi
Barniol, Núria
Perez Murano, Francesc X.
author Arcamone, Julien
author_facet Arcamone, Julien
Rius, Gemma
Abadal, Gabriel
Teva, Jordi
Barniol, Núria
Perez Murano, Francesc X.
author_role author
author2 Rius, Gemma
Abadal, Gabriel
Teva, Jordi
Barniol, Núria
Perez Murano, Francesc X.
author2_role author
author
author
author
author
dc.contributor.none.fl_str_mv Ministerio de Ciencia y Tecnología (España)
European Commission
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Capacitive detection | Distributed mass sensing | Monolithic integration | Nano-micromechanical resonators
topic Capacitive detection | Distributed mass sensing | Monolithic integration | Nano-micromechanical resonators
description Micro/nanomechanical resonators have been designed and fabricated with the aim to be used as distributed mass sensors for in situ measurement of the thickness of ultra-thin layers. First, we present a comparative study of three kinds of oscillating devices (cantilever, bridge and quad beam). The quad beam design has been selected for fabrication because it combines high sensitivity and good electrical response. The complete fabrication process of the device is based on electron beam lithography, lift-off and reactive ion etching. The frequency response has been characterized by means of electrical excitation and capacitive read-out. © 2006 Elsevier B.V. All rights reserved.
publishDate 2006
dc.date.none.fl_str_mv 2006
2024
2024
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Publisher's version
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/343498
https://api.elsevier.com/content/abstract/scopus_id/33646028806
url http://hdl.handle.net/10261/343498
https://api.elsevier.com/content/abstract/scopus_id/33646028806
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv #PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
eu-repo/grantAgreement/EC/FP7/2003-500120
eu-repo/grantAgreement/MCYT//TIC2003-07237-C01
Microelectronic Engineering
10.1016/j.mee.2006.01.177
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
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