Aerosol-assisted CVD of SnO<inf>2</inf> thin films for gas-sensor applications

In this article is a report of SnO2 deposition by aerosol-assisted (AA)CVD from tin complexes, [Sn(18-Cr-6)Cl4] and [Sn(H2O)2Cl4](18-Cr-6). The structure and properties of the precursors, used to synthesize SnO2 layers by AACVD for the first time, are characterized with the help of X-ray diffraction...

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Autores: Stoycheva, Toni T., Vallejos, Stella, Pavelko, Roman G., Popov, Viktor S., Sevastyanov, Vladimir G., Correig, Xavier
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2011
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/345535
Acceso en línea:http://hdl.handle.net/10261/345535
https://api.elsevier.com/content/abstract/scopus_id/80053204639
Access Level:acceso abierto
Palabra clave:AACVD | Gas sensors | Metal oxide | SnO 2
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spelling Aerosol-assisted CVD of SnO<inf>2</inf> thin films for gas-sensor applicationsStoycheva, Toni T.Vallejos, StellaPavelko, Roman G.Popov, Viktor S.Sevastyanov, Vladimir G.Correig, XavierAACVD | Gas sensors | Metal oxide | SnO 2In this article is a report of SnO2 deposition by aerosol-assisted (AA)CVD from tin complexes, [Sn(18-Cr-6)Cl4] and [Sn(H2O)2Cl4](18-Cr-6). The structure and properties of the precursors, used to synthesize SnO2 layers by AACVD for the first time, are characterized with the help of X-ray diffraction (XRD), infrared (IR), and thermogravimetric analysis (TGA). Each complex is deposited by AACVD at 250, 400, and 500°C in a flow of N2. The resulting films are studied by XRD and atomic force microscopy (AFM). Gas-sensing properties of the deposited layers are tested to 10ppm NO2 in air. The maximum sensor response to the analyte is measured at 300°C. Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.Peer reviewedWiley-Blackwell202420242011info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionhttp://hdl.handle.net/10261/345535https://api.elsevier.com/content/abstract/scopus_id/80053204639reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)InglésChemical Vapor Deposition10.1002/cvde.201106917Noinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/3455352026-05-22T06:33:51Z
dc.title.none.fl_str_mv Aerosol-assisted CVD of SnO<inf>2</inf> thin films for gas-sensor applications
title Aerosol-assisted CVD of SnO<inf>2</inf> thin films for gas-sensor applications
spellingShingle Aerosol-assisted CVD of SnO<inf>2</inf> thin films for gas-sensor applications
Stoycheva, Toni T.
AACVD | Gas sensors | Metal oxide | SnO 2
title_short Aerosol-assisted CVD of SnO<inf>2</inf> thin films for gas-sensor applications
title_full Aerosol-assisted CVD of SnO<inf>2</inf> thin films for gas-sensor applications
title_fullStr Aerosol-assisted CVD of SnO<inf>2</inf> thin films for gas-sensor applications
title_full_unstemmed Aerosol-assisted CVD of SnO<inf>2</inf> thin films for gas-sensor applications
title_sort Aerosol-assisted CVD of SnO<inf>2</inf> thin films for gas-sensor applications
dc.creator.none.fl_str_mv Stoycheva, Toni T.
Vallejos, Stella
Pavelko, Roman G.
Popov, Viktor S.
Sevastyanov, Vladimir G.
Correig, Xavier
author Stoycheva, Toni T.
author_facet Stoycheva, Toni T.
Vallejos, Stella
Pavelko, Roman G.
Popov, Viktor S.
Sevastyanov, Vladimir G.
Correig, Xavier
author_role author
author2 Vallejos, Stella
Pavelko, Roman G.
Popov, Viktor S.
Sevastyanov, Vladimir G.
Correig, Xavier
author2_role author
author
author
author
author
dc.subject.none.fl_str_mv AACVD | Gas sensors | Metal oxide | SnO 2
topic AACVD | Gas sensors | Metal oxide | SnO 2
description In this article is a report of SnO2 deposition by aerosol-assisted (AA)CVD from tin complexes, [Sn(18-Cr-6)Cl4] and [Sn(H2O)2Cl4](18-Cr-6). The structure and properties of the precursors, used to synthesize SnO2 layers by AACVD for the first time, are characterized with the help of X-ray diffraction (XRD), infrared (IR), and thermogravimetric analysis (TGA). Each complex is deposited by AACVD at 250, 400, and 500°C in a flow of N2. The resulting films are studied by XRD and atomic force microscopy (AFM). Gas-sensing properties of the deposited layers are tested to 10ppm NO2 in air. The maximum sensor response to the analyte is measured at 300°C. Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
publishDate 2011
dc.date.none.fl_str_mv 2011
2024
2024
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Publisher's version
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/345535
https://api.elsevier.com/content/abstract/scopus_id/80053204639
url http://hdl.handle.net/10261/345535
https://api.elsevier.com/content/abstract/scopus_id/80053204639
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Chemical Vapor Deposition
10.1002/cvde.201106917
No
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Wiley-Blackwell
publisher.none.fl_str_mv Wiley-Blackwell
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15.81155

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