Perspectives on oblique angle deposition of thin films: From fundamentals to devices

The oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostructuration possibilities, as well as a comprehensiv...

Descripción completa

Detalles Bibliográficos
Autores: Barranco Quero, Ángel, Borrás Martos, Ana Isabel, Rodríguez González-Elipe, Agustín, Palmero Acebedo, Alberto
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2016
País:España
Institución:Universidad de Sevilla (US)
Repositorio:idUS. Depósito de Investigación de la Universidad de Sevilla
OAI Identifier:oai:idus.us.es:11441/83885
Acceso en línea:https://hdl.handle.net/11441/83885
https://doi.org/10.1016/j.pmatsci.2015.06.003
Access Level:acceso abierto
Palabra clave:Oblique angle deposition
Glancing angle deposition
Magnetron sputtering
Electron beam evaporation
Nanostructured films
Growth modeling
Monte Carlo
Thin film devices
Transparent conductive oxide
Energy harvesting
Sensors
Optical devices
Wetting
Biomaterials
Biosensing
GLAD
Photovoltaic cells
id ES_5c718bc2d9a740dfe7a8eaf87f043ee2
oai_identifier_str oai:idus.us.es:11441/83885
network_acronym_str ES
network_name_str España
repository_id_str
spelling Perspectives on oblique angle deposition of thin films: From fundamentals to devicesBarranco Quero, ÁngelBorrás Martos, Ana IsabelRodríguez González-Elipe, AgustínPalmero Acebedo, AlbertoOblique angle depositionGlancing angle depositionMagnetron sputteringElectron beam evaporationNanostructured filmsGrowth modelingMonte CarloThin film devicesTransparent conductive oxideEnergy harvestingSensorsOptical devicesWettingBiomaterialsBiosensingGLADPhotovoltaic cellsThe oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostructuration possibilities, as well as a comprehensive description of the applications benefiting from its incorporation in actual devices. In contrast with other reviews on the subject, the electron beam assisted evaporation technique is analyzed along with other methods operating at oblique angles, including, among others, magnetron sputtering and pulsed laser or ion beam-assisted deposition techniques. To account for the existing differences between deposition in vacuum or in the presence of a plasma, mechanistic simulations are critically revised, discussing well-established paradigms such as the tangent or cosine rules, and proposing new models that explain the growth of tilted porous nanostructures. In the second part, we present an extensive description of applications wherein oblique-angle-deposited thin films are of relevance. From there, we proceed by considering the requirements of a large number of functional devices in which these films are currently being utilized (e.g., solar cells, Li batteries, electrochromic glasses, biomaterials, sensors, etc.), and subsequently describe how and why these nanostructured materials meet with these needs.Junta de Andalucía TEP8067, TEP5283, P10-FQM-6900Ministerio de Economía y Competitividad CSD2008-00023 MAT2013-42900-P, MAT2013- 40852-RElsevierQuímica InorgánicaJunta de AndalucíaMinisterio de Economía y Competitividad (MINECO). España2016info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionapplication/pdfapplication/pdfhttps://hdl.handle.net/11441/83885https://doi.org/10.1016/j.pmatsci.2015.06.003reponame:idUS. Depósito de Investigación de la Universidad de Sevillainstname:Universidad de Sevilla (US)InglésProgress in Materials Science, 76, 59-152.TEP8067TEP5283P10-FQM-6900CSD2008-00023MAT2013-42900-PMAT2013- 40852-Rhttp://dx.doi.org/10.1016/j.pmatsci.2015.06.003info:eu-repo/semantics/openAccessoai:idus.us.es:11441/838852026-06-17T12:51:07Z
dc.title.none.fl_str_mv Perspectives on oblique angle deposition of thin films: From fundamentals to devices
title Perspectives on oblique angle deposition of thin films: From fundamentals to devices
spellingShingle Perspectives on oblique angle deposition of thin films: From fundamentals to devices
Barranco Quero, Ángel
Oblique angle deposition
Glancing angle deposition
Magnetron sputtering
Electron beam evaporation
Nanostructured films
Growth modeling
Monte Carlo
Thin film devices
Transparent conductive oxide
Energy harvesting
Sensors
Optical devices
Wetting
Biomaterials
Biosensing
GLAD
Photovoltaic cells
title_short Perspectives on oblique angle deposition of thin films: From fundamentals to devices
title_full Perspectives on oblique angle deposition of thin films: From fundamentals to devices
title_fullStr Perspectives on oblique angle deposition of thin films: From fundamentals to devices
title_full_unstemmed Perspectives on oblique angle deposition of thin films: From fundamentals to devices
title_sort Perspectives on oblique angle deposition of thin films: From fundamentals to devices
dc.creator.none.fl_str_mv Barranco Quero, Ángel
Borrás Martos, Ana Isabel
Rodríguez González-Elipe, Agustín
Palmero Acebedo, Alberto
author Barranco Quero, Ángel
author_facet Barranco Quero, Ángel
Borrás Martos, Ana Isabel
Rodríguez González-Elipe, Agustín
Palmero Acebedo, Alberto
author_role author
author2 Borrás Martos, Ana Isabel
Rodríguez González-Elipe, Agustín
Palmero Acebedo, Alberto
author2_role author
author
author
dc.contributor.none.fl_str_mv Química Inorgánica
Junta de Andalucía
Ministerio de Economía y Competitividad (MINECO). España
dc.subject.none.fl_str_mv Oblique angle deposition
Glancing angle deposition
Magnetron sputtering
Electron beam evaporation
Nanostructured films
Growth modeling
Monte Carlo
Thin film devices
Transparent conductive oxide
Energy harvesting
Sensors
Optical devices
Wetting
Biomaterials
Biosensing
GLAD
Photovoltaic cells
topic Oblique angle deposition
Glancing angle deposition
Magnetron sputtering
Electron beam evaporation
Nanostructured films
Growth modeling
Monte Carlo
Thin film devices
Transparent conductive oxide
Energy harvesting
Sensors
Optical devices
Wetting
Biomaterials
Biosensing
GLAD
Photovoltaic cells
description The oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostructuration possibilities, as well as a comprehensive description of the applications benefiting from its incorporation in actual devices. In contrast with other reviews on the subject, the electron beam assisted evaporation technique is analyzed along with other methods operating at oblique angles, including, among others, magnetron sputtering and pulsed laser or ion beam-assisted deposition techniques. To account for the existing differences between deposition in vacuum or in the presence of a plasma, mechanistic simulations are critically revised, discussing well-established paradigms such as the tangent or cosine rules, and proposing new models that explain the growth of tilted porous nanostructures. In the second part, we present an extensive description of applications wherein oblique-angle-deposited thin films are of relevance. From there, we proceed by considering the requirements of a large number of functional devices in which these films are currently being utilized (e.g., solar cells, Li batteries, electrochromic glasses, biomaterials, sensors, etc.), and subsequently describe how and why these nanostructured materials meet with these needs.
publishDate 2016
dc.date.none.fl_str_mv 2016
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv https://hdl.handle.net/11441/83885
https://doi.org/10.1016/j.pmatsci.2015.06.003
url https://hdl.handle.net/11441/83885
https://doi.org/10.1016/j.pmatsci.2015.06.003
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Progress in Materials Science, 76, 59-152.
TEP8067
TEP5283
P10-FQM-6900
CSD2008-00023
MAT2013-42900-P
MAT2013- 40852-R
http://dx.doi.org/10.1016/j.pmatsci.2015.06.003
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:idUS. Depósito de Investigación de la Universidad de Sevilla
instname:Universidad de Sevilla (US)
instname_str Universidad de Sevilla (US)
reponame_str idUS. Depósito de Investigación de la Universidad de Sevilla
collection idUS. Depósito de Investigación de la Universidad de Sevilla
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869408913688887296
score 15,300719

Similares en LA Referencia