Microstructural Evolution and Properties of He-charged a-Si Coatings Prepared by Magnetron Sputtering

The introduction of porosity in nanomaterials via magnetron sputtering in helium atmospheres is an interesting strategy for the design of functional materials. Amorphous silicon coatings, with high concentration of He incorporated in the form of overpressurized nano-bubbles, present modified optical...

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Autores: Fortio Godinho, Vanda Cristina, Caballero Hernández, J., Lacroix, Bertrand, Ferrer Fernández, Francisco Javier, Jamon, D., Jiménez de Haro, M. C., Fernández, A.
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2024
País:España
Institución:Universidad de Sevilla (US)
Repositorio:idUS. Depósito de Investigación de la Universidad de Sevilla
OAI Identifier:oai:idus.us.es:11441/158309
Acceso en línea:https://hdl.handle.net/11441/158309
https://doi.org/10.1016/j.apsusc.2023.158681
Access Level:acceso abierto
Palabra clave:Amorphous silicon
Annealing effects
Band gap
Helium bubbles
Optical properties
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spelling Microstructural Evolution and Properties of He-charged a-Si Coatings Prepared by Magnetron SputteringFortio Godinho, Vanda CristinaCaballero Hernández, J.Lacroix, BertrandFerrer Fernández, Francisco JavierJamon, D.Jiménez de Haro, M. C.Fernández, A.Amorphous siliconAnnealing effectsBand gapHelium bubblesOptical propertiesThe introduction of porosity in nanomaterials via magnetron sputtering in helium atmospheres is an interesting strategy for the design of functional materials. Amorphous silicon coatings, with high concentration of He incorporated in the form of overpressurized nano-bubbles, present modified optical properties in comparison with dense coatings of similar composition. In this work, annealing process in He atmosphere from 300 °C up to 1200 °C is performed to evaluate stability after the release of He from the a-Si:He coatings (thickness ∼1700 nm) and to favor matrix crystallization and defect evolution. The work is focused on these effects on the silicon film and its properties. The composition and microstructural evolution of the coatings annealed to temperatures as high as 1200° were investigated by electron microscopy and X-Ray diffraction. Annealing effects on the optical properties and bandgap of the silicon coatings were evaluated by ellipsometry and UV–Vis spectrometry. Helium release from the coating, densification, defects evolution and ordering due to crystallization have a small effect on the refractive index, but cause a significant change in the material band gap from 1.37 eV to 1.80 eV.Ministerio de Ciencia e Innovación ID2021-124439NB-I00, PID2021-123879OB-C2Junta de Andalucía P20-00239Consejo Superior de Investigaciones Científicas 202160E029ElsevierFísica Atómica, Molecular y NuclearMinisterio de Ciencia e Innovación (MICIN). EspañaJunta de AndalucíaConsejo Superior de Investigaciones Científicas (CSIC)2024info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionapplication/pdfapplication/pdfhttps://hdl.handle.net/11441/158309https://doi.org/10.1016/j.apsusc.2023.158681reponame:idUS. Depósito de Investigación de la Universidad de Sevillainstname:Universidad de Sevilla (US)InglésApplied Surface Science, 643, 158681.ID2021-124439NB-I00PID2021-123879OB-C2P20-00239202160E029https://doi.org/10.1016/j.apsusc.2023.158681info:eu-repo/semantics/openAccessoai:idus.us.es:11441/1583092026-06-17T12:51:07Z
dc.title.none.fl_str_mv Microstructural Evolution and Properties of He-charged a-Si Coatings Prepared by Magnetron Sputtering
title Microstructural Evolution and Properties of He-charged a-Si Coatings Prepared by Magnetron Sputtering
spellingShingle Microstructural Evolution and Properties of He-charged a-Si Coatings Prepared by Magnetron Sputtering
Fortio Godinho, Vanda Cristina
Amorphous silicon
Annealing effects
Band gap
Helium bubbles
Optical properties
title_short Microstructural Evolution and Properties of He-charged a-Si Coatings Prepared by Magnetron Sputtering
title_full Microstructural Evolution and Properties of He-charged a-Si Coatings Prepared by Magnetron Sputtering
title_fullStr Microstructural Evolution and Properties of He-charged a-Si Coatings Prepared by Magnetron Sputtering
title_full_unstemmed Microstructural Evolution and Properties of He-charged a-Si Coatings Prepared by Magnetron Sputtering
title_sort Microstructural Evolution and Properties of He-charged a-Si Coatings Prepared by Magnetron Sputtering
dc.creator.none.fl_str_mv Fortio Godinho, Vanda Cristina
Caballero Hernández, J.
Lacroix, Bertrand
Ferrer Fernández, Francisco Javier
Jamon, D.
Jiménez de Haro, M. C.
Fernández, A.
author Fortio Godinho, Vanda Cristina
author_facet Fortio Godinho, Vanda Cristina
Caballero Hernández, J.
Lacroix, Bertrand
Ferrer Fernández, Francisco Javier
Jamon, D.
Jiménez de Haro, M. C.
Fernández, A.
author_role author
author2 Caballero Hernández, J.
Lacroix, Bertrand
Ferrer Fernández, Francisco Javier
Jamon, D.
Jiménez de Haro, M. C.
Fernández, A.
author2_role author
author
author
author
author
author
dc.contributor.none.fl_str_mv Física Atómica, Molecular y Nuclear
Ministerio de Ciencia e Innovación (MICIN). España
Junta de Andalucía
Consejo Superior de Investigaciones Científicas (CSIC)
dc.subject.none.fl_str_mv Amorphous silicon
Annealing effects
Band gap
Helium bubbles
Optical properties
topic Amorphous silicon
Annealing effects
Band gap
Helium bubbles
Optical properties
description The introduction of porosity in nanomaterials via magnetron sputtering in helium atmospheres is an interesting strategy for the design of functional materials. Amorphous silicon coatings, with high concentration of He incorporated in the form of overpressurized nano-bubbles, present modified optical properties in comparison with dense coatings of similar composition. In this work, annealing process in He atmosphere from 300 °C up to 1200 °C is performed to evaluate stability after the release of He from the a-Si:He coatings (thickness ∼1700 nm) and to favor matrix crystallization and defect evolution. The work is focused on these effects on the silicon film and its properties. The composition and microstructural evolution of the coatings annealed to temperatures as high as 1200° were investigated by electron microscopy and X-Ray diffraction. Annealing effects on the optical properties and bandgap of the silicon coatings were evaluated by ellipsometry and UV–Vis spectrometry. Helium release from the coating, densification, defects evolution and ordering due to crystallization have a small effect on the refractive index, but cause a significant change in the material band gap from 1.37 eV to 1.80 eV.
publishDate 2024
dc.date.none.fl_str_mv 2024
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv https://hdl.handle.net/11441/158309
https://doi.org/10.1016/j.apsusc.2023.158681
url https://hdl.handle.net/11441/158309
https://doi.org/10.1016/j.apsusc.2023.158681
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Applied Surface Science, 643, 158681.
ID2021-124439NB-I00
PID2021-123879OB-C2
P20-00239
202160E029
https://doi.org/10.1016/j.apsusc.2023.158681
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:idUS. Depósito de Investigación de la Universidad de Sevilla
instname:Universidad de Sevilla (US)
instname_str Universidad de Sevilla (US)
reponame_str idUS. Depósito de Investigación de la Universidad de Sevilla
collection idUS. Depósito de Investigación de la Universidad de Sevilla
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