Early stages of melting in Si under nanosecond laser pulse irradiation: A time-resolved study

Time-resolved reflectivity (TRR) measurements are performed in crystalline Si under UV and visible wavelength irradiation. The former are carried out with ArF excimer laser pulses whereas the latter are performed in micron-sized areas irradiated with Ar+ laser pulses by means of a novel experimental...

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Autores: Solís Céspedes, Javier, Afonso, Carmen N.
Formato: artículo
Fecha de publicación:1991
País:España
Recursos:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/64448
Acesso em linha:http://hdl.handle.net/10261/64448
Access Level:acceso abierto
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spelling Early stages of melting in Si under nanosecond laser pulse irradiation: A time-resolved studySolís Céspedes, JavierAfonso, Carmen N.Time-resolved reflectivity (TRR) measurements are performed in crystalline Si under UV and visible wavelength irradiation. The former are carried out with ArF excimer laser pulses whereas the latter are performed in micron-sized areas irradiated with Ar+ laser pulses by means of a novel experimental setup. It is the first time that TRR measurements in the nanosecond regime are performed in micron-sized irradiated areas although they are very suitable to characterize processes in phase change optical storage and microelectronics applications. The energy density melting thresholds at both Ar+ and ArF laser wavelengths are determined. The reflectivity values obtained for pulse fluences just above the melting threshold show that melting proceeds inhomogeneously being the near-surface region formed by a mixture of solid and liquid phases without a well-defined interface. The comparison of the results obtained with uv and visible irradiation indicates that inhomogeneous melting is a general phenomenon which does not depend on the irradiation wavelength. It is present in the early stages of the melting process and its origin is related to the phase nucleation process itself. As the laser fluence is increased, the evolution of the melt duration exhibits a >different> behavior which is related to the formation of a homogeneous molten layer on top of the surface.We greatly acknowledge Dr. F. Catalina (Instituto de Optica, CSIC, Spain) for many helpful discussions. This work was partially supported by CICYT (Spain) under project MAT88-0437. Peer ReviewedAmerican Institute of Physics2013201319912013info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501http://hdl.handle.net/10261/64448reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglésinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/644482026-05-22T06:33:51Z
dc.title.none.fl_str_mv Early stages of melting in Si under nanosecond laser pulse irradiation: A time-resolved study
title Early stages of melting in Si under nanosecond laser pulse irradiation: A time-resolved study
spellingShingle Early stages of melting in Si under nanosecond laser pulse irradiation: A time-resolved study
Solís Céspedes, Javier
title_short Early stages of melting in Si under nanosecond laser pulse irradiation: A time-resolved study
title_full Early stages of melting in Si under nanosecond laser pulse irradiation: A time-resolved study
title_fullStr Early stages of melting in Si under nanosecond laser pulse irradiation: A time-resolved study
title_full_unstemmed Early stages of melting in Si under nanosecond laser pulse irradiation: A time-resolved study
title_sort Early stages of melting in Si under nanosecond laser pulse irradiation: A time-resolved study
dc.creator.none.fl_str_mv Solís Céspedes, Javier
Afonso, Carmen N.
author Solís Céspedes, Javier
author_facet Solís Céspedes, Javier
Afonso, Carmen N.
author_role author
author2 Afonso, Carmen N.
author2_role author
description Time-resolved reflectivity (TRR) measurements are performed in crystalline Si under UV and visible wavelength irradiation. The former are carried out with ArF excimer laser pulses whereas the latter are performed in micron-sized areas irradiated with Ar+ laser pulses by means of a novel experimental setup. It is the first time that TRR measurements in the nanosecond regime are performed in micron-sized irradiated areas although they are very suitable to characterize processes in phase change optical storage and microelectronics applications. The energy density melting thresholds at both Ar+ and ArF laser wavelengths are determined. The reflectivity values obtained for pulse fluences just above the melting threshold show that melting proceeds inhomogeneously being the near-surface region formed by a mixture of solid and liquid phases without a well-defined interface. The comparison of the results obtained with uv and visible irradiation indicates that inhomogeneous melting is a general phenomenon which does not depend on the irradiation wavelength. It is present in the early stages of the melting process and its origin is related to the phase nucleation process itself. As the laser fluence is increased, the evolution of the melt duration exhibits a >different> behavior which is related to the formation of a homogeneous molten layer on top of the surface.
publishDate 1991
dc.date.none.fl_str_mv 1991
2013
2013
2013
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/64448
url http://hdl.handle.net/10261/64448
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv American Institute of Physics
publisher.none.fl_str_mv American Institute of Physics
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,811543

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