Performance characterization of an optical profiler through the measurement of the linearity deviations of the scanner
An optical profiler for three dimensional measurements obtains the height data by scanning the sample under measurement through the depth of focus of the objective under use. The most common scanning devices are linear motorized stages and piezoelectric devices in both, close-loop and open-loop cont...
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| Tipo de recurso: | tesis de maestría |
| Fecha de publicación: | 2018 |
| País: | España |
| Institución: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglés |
| OAI Identifier: | oai:upcommons.upc.edu:2117/124376 |
| Acceso en línea: | https://hdl.handle.net/2117/124376 |
| Access Level: | acceso abierto |
| Palabra clave: | Interferometry Lasers Imaging systems Laser interferometry Motor characterization Confocal Microscopy Interferometria Làsers Imatgeria (Tècnica) Àrees temàtiques de la UPC::Enginyeria de la telecomunicació |
| Sumario: | An optical profiler for three dimensional measurements obtains the height data by scanning the sample under measurement through the depth of focus of the objective under use. The most common scanning devices are linear motorized stages and piezoelectric devices in both, close-loop and open-loop control. The accuracy and repeatability of height data are subject to the linearity movement of the vertical scanning stage. Today, optical profilers are characterized by using a traceable standard, such as a vertical step height, which is measured several times to compute its avera |
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