Residual flatness error correction in three dimensional imaging confocal microscopes
Imaging Confocal Microscopes (ICM) are highly used for the assessment of three-dimensional measurement of technical surfaces. The benefit of an ICM in comparison to an interferometer is the use of high numerical aperture microscope objectives, which allows retrieving signal from high slope regions o...
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| Tipo de recurso: | tesis de maestría |
| Fecha de publicación: | 2018 |
| País: | España |
| Institución: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglés |
| OAI Identifier: | oai:upcommons.upc.edu:2117/123905 |
| Acceso en línea: | https://hdl.handle.net/2117/123905 |
| Access Level: | acceso abierto |
| Palabra clave: | Interferometry Imaging systems Confocal Microscopy Metrology Surface measurements Calibration Interferometria Imatgeria (Tècnica) Àrees temàtiques de la UPC::Enginyeria de la telecomunicació |
| Sumario: | Imaging Confocal Microscopes (ICM) are highly used for the assessment of three-dimensional measurement of technical surfaces. The benefit of an ICM in comparison to an interferometer is the use of high numerical aperture microscope objectives, which allows retrieving signal from high slope regions of a surface. When measuring a flat sample, such as a high-quality mirror, all ICM?s show a non-uniform flat result, but a complex shape of low frequencies. ISO 25178-607 states that a ?/10 calibration mirror with less than 0.5nm Sa roughness should be measured, and the result top |
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