Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monol...

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Autores: Ledesma, Eyglis|||0000-0002-6967-6565, Zamora Díaz Comas, Ivan|||0000-0003-3787-4708, Yanez, Jesus|||0000-0003-0775-430X, Uranga del Monte, Aránzazu|||0000-0002-3593-4060, Barniol i Beumala, Núria|||0000-0001-6325-2166
Tipo de recurso: artículo
Fecha de publicación:2022
País:España
Institución:Universitat Autònoma de Barcelona
Repositorio:Dipòsit Digital de Documents de la UAB
Idioma:inglés
OAI Identifier:oai:ddd.uab.cat:292922
Acceso en línea:https://ddd.uab.cat/record/292922
https://dx.doi.org/urn:doi:10.1038/s41378-022-00413-y
Access Level:acceso abierto
Palabra clave:Electrical and electronic engineering
Engineering
id ES_320fca913fc2b92c50b5f14944ccb05a
oai_identifier_str oai:ddd.uab.cat:292922
network_acronym_str ES
network_name_str España
repository_id_str
spelling Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic propertiesLedesma, Eyglis|||0000-0002-6967-6565Zamora Díaz Comas, Ivan|||0000-0003-3787-4708Yanez, Jesus|||0000-0003-0775-430XUranga del Monte, Aránzazu|||0000-0002-3593-4060Barniol i Beumala, Núria|||0000-0001-6325-2166Electrical and electronic engineeringEngineeringIn this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monolithically fabricated with a 130 nm complementary metal-oxide semiconductor (CMOS) process. The electrode configuration allows the entire system to be implemented in a single device, where one electrode is used as an input and the other as an output. Experimental verification was carried out by exploiting the features of piezoelectric devices such as resonators and acoustic transducers, where a frequency shift and amplitude variation are expected because of a change in density and viscosity. A sensitivity of 482 ± 14 Hz/kg/m 3 demonstrates the potential of the system compared to other dual-electrode PMUTs. In addition, according to the acoustic measurement, the sound velocity, fluid compressibility, and viscosity coefficient can be extracted, which, to the best of our knowledge, is novel in these PMUT systems. 22022-01-0120222022-01-01Articlehttp://purl.org/coar/resource_type/c_6501VoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85info:eu-repo/semantics/articleapplication/pdfhttps://ddd.uab.cat/record/292922https://dx.doi.org/urn:doi:10.1038/s41378-022-00413-yreponame:Dipòsit Digital de Documents de la UABinstname:Universitat Autònoma de BarcelonaInglésengAgencia Estatal de Investigación https://doi.org/10.13039/501100011033 PID2019-108270RB-I00open accesshttp://purl.org/coar/access_right/c_abf2Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.https://creativecommons.org/licenses/by/4.0/info:eu-repo/semantics/openAccessoai:ddd.uab.cat:2929222026-06-06T12:50:31Z
dc.title.none.fl_str_mv Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
title Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
spellingShingle Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
Ledesma, Eyglis|||0000-0002-6967-6565
Electrical and electronic engineering
Engineering
title_short Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
title_full Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
title_fullStr Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
title_full_unstemmed Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
title_sort Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
dc.creator.none.fl_str_mv Ledesma, Eyglis|||0000-0002-6967-6565
Zamora Díaz Comas, Ivan|||0000-0003-3787-4708
Yanez, Jesus|||0000-0003-0775-430X
Uranga del Monte, Aránzazu|||0000-0002-3593-4060
Barniol i Beumala, Núria|||0000-0001-6325-2166
author Ledesma, Eyglis|||0000-0002-6967-6565
author_facet Ledesma, Eyglis|||0000-0002-6967-6565
Zamora Díaz Comas, Ivan|||0000-0003-3787-4708
Yanez, Jesus|||0000-0003-0775-430X
Uranga del Monte, Aránzazu|||0000-0002-3593-4060
Barniol i Beumala, Núria|||0000-0001-6325-2166
author_role author
author2 Zamora Díaz Comas, Ivan|||0000-0003-3787-4708
Yanez, Jesus|||0000-0003-0775-430X
Uranga del Monte, Aránzazu|||0000-0002-3593-4060
Barniol i Beumala, Núria|||0000-0001-6325-2166
author2_role author
author
author
author
dc.subject.none.fl_str_mv Electrical and electronic engineering
Engineering
topic Electrical and electronic engineering
Engineering
description In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monolithically fabricated with a 130 nm complementary metal-oxide semiconductor (CMOS) process. The electrode configuration allows the entire system to be implemented in a single device, where one electrode is used as an input and the other as an output. Experimental verification was carried out by exploiting the features of piezoelectric devices such as resonators and acoustic transducers, where a frequency shift and amplitude variation are expected because of a change in density and viscosity. A sensitivity of 482 ± 14 Hz/kg/m 3 demonstrates the potential of the system compared to other dual-electrode PMUTs. In addition, according to the acoustic measurement, the sound velocity, fluid compressibility, and viscosity coefficient can be extracted, which, to the best of our knowledge, is novel in these PMUT systems.
publishDate 2022
dc.date.none.fl_str_mv 2
2022-01-01
2022
2022-01-01
dc.type.none.fl_str_mv Article
http://purl.org/coar/resource_type/c_6501
VoR
http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://ddd.uab.cat/record/292922
https://dx.doi.org/urn:doi:10.1038/s41378-022-00413-y
url https://ddd.uab.cat/record/292922
https://dx.doi.org/urn:doi:10.1038/s41378-022-00413-y
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.relation.none.fl_str_mv Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 PID2019-108270RB-I00
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
https://creativecommons.org/licenses/by/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
https://creativecommons.org/licenses/by/4.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:Dipòsit Digital de Documents de la UAB
instname:Universitat Autònoma de Barcelona
instname_str Universitat Autònoma de Barcelona
reponame_str Dipòsit Digital de Documents de la UAB
collection Dipòsit Digital de Documents de la UAB
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869405651719946240
score 15.812455

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