Squared PMUT with enhanced pressure sensitivities
This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be mono...
| Autores: | , , , , , , , |
|---|---|
| Tipo de recurso: | artículo |
| Fecha de publicación: | 2018 |
| País: | España |
| Institución: | Universitat Autònoma de Barcelona |
| Repositorio: | Dipòsit Digital de Documents de la UAB |
| Idioma: | inglés |
| OAI Identifier: | oai:ddd.uab.cat:216972 |
| Acceso en línea: | https://ddd.uab.cat/record/216972 https://dx.doi.org/urn:doi:10.3390/proceedings2130925 |
| Access Level: | acceso abierto |
| Palabra clave: | Piezoelectric micromachined ultrasonic transducer (PMUT) Differential excitation Transmitting sensitivity Receiving sensitivity |
| Sumario: | This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now. |
|---|