Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive index

In this work, we report the successful growth of ZnO nanostructured films by oblique angle magnetron sputtering deposition (OAD) from a Zn target in a mixture gas of Ar/O2. The film microstructure and the surface morphology of the samples were explored by HRSEM. The crystalline structure and the com...

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Autores: Toledano, Diana, Escobar-Galindo, Ramón, Yuste, Miriam, Albella Martín, José María, Sánchez, Olga
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2012
País:España
Institución:Universidad de Sevilla (US)
Repositorio:idUS. Depósito de Investigación de la Universidad de Sevilla
OAI Identifier:oai:idus.us.es:11441/147350
Acceso en línea:https://hdl.handle.net/11441/147350
https://doi.org/10.1088/0022-3727/46/4/045306
Access Level:acceso abierto
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spelling Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive indexToledano, DianaEscobar-Galindo, RamónYuste, MiriamAlbella Martín, José MaríaSánchez, OlgaIn this work, we report the successful growth of ZnO nanostructured films by oblique angle magnetron sputtering deposition (OAD) from a Zn target in a mixture gas of Ar/O2. The film microstructure and the surface morphology of the samples were explored by HRSEM. The crystalline structure and the composition were determined by XRD and RBS, respectively. The optical properties of the ZnO films (refractive index, n, and extinction coefficient, k) were also studied by spectroscopic ellipsometry. Films were found to be porous and consisting of an inclined columnar structure, with columns tilting in the direction of the incident flux. The experimental results reveal that the deposition angle, the Ar/O2 gas ratio and the distance between the target and the substrate play a significant role in the composition, crystalline structure and optical and electrical properties of the ZnO thin films. In particular, it has been found that using different deposition angles in the range 0◦–85◦ it is possible to control the refractive index varying from 1.9 to 1.5, due to the high porosity of the films as a result of the self-shadowing columnar structure produced during the process.Ministerio de Ciencia e Innovación CSD2008-00023 (FUNCOAT)Ministerio de Ciencia e Innovación RyC2007-0026IOP ScienceFísica Aplicada IMinisterio de Ciencia e Innovación (MICIN). España2012info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionapplication/pdfapplication/pdfhttps://hdl.handle.net/11441/147350https://doi.org/10.1088/0022-3727/46/4/045306reponame:idUS. Depósito de Investigación de la Universidad de Sevillainstname:Universidad de Sevilla (US)InglésJournal of Physics D: Applied Physics, 46 (4).CSD2008-00023 (FUNCOAT)RyC2007-0026https://iopscience.iop.org/article/10.1088/0022-3727/46/4/045306info:eu-repo/semantics/openAccessoai:idus.us.es:11441/1473502026-06-17T12:51:07Z
dc.title.none.fl_str_mv Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive index
title Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive index
spellingShingle Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive index
Toledano, Diana
title_short Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive index
title_full Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive index
title_fullStr Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive index
title_full_unstemmed Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive index
title_sort Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive index
dc.creator.none.fl_str_mv Toledano, Diana
Escobar-Galindo, Ramón
Yuste, Miriam
Albella Martín, José María
Sánchez, Olga
author Toledano, Diana
author_facet Toledano, Diana
Escobar-Galindo, Ramón
Yuste, Miriam
Albella Martín, José María
Sánchez, Olga
author_role author
author2 Escobar-Galindo, Ramón
Yuste, Miriam
Albella Martín, José María
Sánchez, Olga
author2_role author
author
author
author
dc.contributor.none.fl_str_mv Física Aplicada I
Ministerio de Ciencia e Innovación (MICIN). España
description In this work, we report the successful growth of ZnO nanostructured films by oblique angle magnetron sputtering deposition (OAD) from a Zn target in a mixture gas of Ar/O2. The film microstructure and the surface morphology of the samples were explored by HRSEM. The crystalline structure and the composition were determined by XRD and RBS, respectively. The optical properties of the ZnO films (refractive index, n, and extinction coefficient, k) were also studied by spectroscopic ellipsometry. Films were found to be porous and consisting of an inclined columnar structure, with columns tilting in the direction of the incident flux. The experimental results reveal that the deposition angle, the Ar/O2 gas ratio and the distance between the target and the substrate play a significant role in the composition, crystalline structure and optical and electrical properties of the ZnO thin films. In particular, it has been found that using different deposition angles in the range 0◦–85◦ it is possible to control the refractive index varying from 1.9 to 1.5, due to the high porosity of the films as a result of the self-shadowing columnar structure produced during the process.
publishDate 2012
dc.date.none.fl_str_mv 2012
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv https://hdl.handle.net/11441/147350
https://doi.org/10.1088/0022-3727/46/4/045306
url https://hdl.handle.net/11441/147350
https://doi.org/10.1088/0022-3727/46/4/045306
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Journal of Physics D: Applied Physics, 46 (4).
CSD2008-00023 (FUNCOAT)
RyC2007-0026
https://iopscience.iop.org/article/10.1088/0022-3727/46/4/045306
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv IOP Science
publisher.none.fl_str_mv IOP Science
dc.source.none.fl_str_mv reponame:idUS. Depósito de Investigación de la Universidad de Sevilla
instname:Universidad de Sevilla (US)
instname_str Universidad de Sevilla (US)
reponame_str idUS. Depósito de Investigación de la Universidad de Sevilla
collection idUS. Depósito de Investigación de la Universidad de Sevilla
repository.name.fl_str_mv
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