A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection

This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscilla...

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Detalles Bibliográficos
Autores: Perello-Roig, Rafel, Verd, Jaume, Barcelo, Joan, Bota, Sebastia, Segura, Jaume
Tipo de recurso: artículo
Fecha de publicación:2018
País:España
Institución:Instituto de Salud Carlos III (ISCIII)
Repositorio:Repisalud
Idioma:inglés
OAI Identifier:oai:repisalud.isciii.es:20.500.12105/22585
Acceso en línea:https://hdl.handle.net/20.500.12105/22585
Access Level:acceso abierto
Palabra clave:MEMS resonators
Mass sensors
CMOS-MEMS
Pierce oscillator
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spelling A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass DetectionPerello-Roig, RafelVerd, JaumeBarcelo, JoanBota, SebastiaSegura, JaumeMEMS resonatorsMass sensorsCMOS-MEMSPierce oscillatorThis paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.Multidisciplinary Digital Publishing Institute (MDPI)20242024-09-0620182018-10-0120182018-10-01research articlehttp://purl.org/coar/resource_type/c_2df8fbb1info:eu-repo/semantics/articlehttps://hdl.handle.net/20.500.12105/22585reponame:Repisaludinstname:Instituto de Salud Carlos III (ISCIII)Inglésengopen accesshttp://purl.org/coar/access_right/c_abf2Attribution 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/info:eu-repo/semantics/openAccessoai:repisalud.isciii.es:20.500.12105/225852026-06-12T12:43:37Z
dc.title.none.fl_str_mv A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
title A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
spellingShingle A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
Perello-Roig, Rafel
MEMS resonators
Mass sensors
CMOS-MEMS
Pierce oscillator
title_short A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
title_full A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
title_fullStr A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
title_full_unstemmed A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
title_sort A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
dc.creator.none.fl_str_mv Perello-Roig, Rafel
Verd, Jaume
Barcelo, Joan
Bota, Sebastia
Segura, Jaume
author Perello-Roig, Rafel
author_facet Perello-Roig, Rafel
Verd, Jaume
Barcelo, Joan
Bota, Sebastia
Segura, Jaume
author_role author
author2 Verd, Jaume
Barcelo, Joan
Bota, Sebastia
Segura, Jaume
author2_role author
author
author
author
dc.contributor.none.fl_str_mv
dc.subject.none.fl_str_mv MEMS resonators
Mass sensors
CMOS-MEMS
Pierce oscillator
topic MEMS resonators
Mass sensors
CMOS-MEMS
Pierce oscillator
description This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.
publishDate 2018
dc.date.none.fl_str_mv 2018
2018-10-01
2018
2018-10-01
2024
2024-09-06
dc.type.none.fl_str_mv research article
http://purl.org/coar/resource_type/c_2df8fbb1
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://hdl.handle.net/20.500.12105/22585
url https://hdl.handle.net/20.500.12105/22585
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute (MDPI)
publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute (MDPI)
dc.source.none.fl_str_mv reponame:Repisalud
instname:Instituto de Salud Carlos III (ISCIII)
instname_str Instituto de Salud Carlos III (ISCIII)
reponame_str Repisalud
collection Repisalud
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,81155

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