Spectroscopic ellipsometry of very rough surfaces

This work expands the use of spectroscopic ellipsometry to surfaces with roughness that is similar to or larger than the wavelength of the incident light. By using a custom-built spectroscopic ellipsometer and varying the angle of incidence, we were able to differentiate between the diffusely scatte...

Descripción completa

Detalles Bibliográficos
Autores: Bian, Subiao, Arteaga Barriel, Oriol
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2023
País:España
Institución:Universidad de Barcelona
Repositorio:Dipòsit Digital de la UB
OAI Identifier:oai:diposit.ub.edu:2445/219744
Acceso en línea:https://hdl.handle.net/2445/219744
Access Level:acceso abierto
Palabra clave:Propietats òptiques
El·lipsometria
Optical properties
Ellipsometry
id ES_2439a73ca298aa315fa8d0f0fef8e442
oai_identifier_str oai:diposit.ub.edu:2445/219744
network_acronym_str ES
network_name_str España
repository_id_str
spelling Spectroscopic ellipsometry of very rough surfacesBian, SubiaoArteaga Barriel, OriolPropietats òptiquesEl·lipsometriaOptical propertiesEllipsometryThis work expands the use of spectroscopic ellipsometry to surfaces with roughness that is similar to or larger than the wavelength of the incident light. By using a custom-built spectroscopic ellipsometer and varying the angle of incidence, we were able to differentiate between the diffusely scattered and specularly reflected components. Our findings demonstrate that measuring the diffuse component at specular angles is highly beneficial for ellipsometry analysis, as its response is equivalent to that of a smooth material. This allows for accurate determination of the optical constants in materials with extremely rough surfaces. Our results have the potential to broaden the scope and utility of the spectroscopic ellipsometry technique.Optical Society of America2023info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionapplication/pdfhttps://hdl.handle.net/2445/219744Articles publicats en revistes (Física Aplicada)reponame:Dipòsit Digital de la UBinstname:Universidad de BarcelonaInglésReproducció del document publicat a: https://doi.org/10.1364/OE.490197Optics Express, 2023, vol. 31, num.12, p. 19632-19645https://doi.org/10.1364/OE.490197cc-by (c) Bian, Subiao, et al., 2023http://creativecommons.org/licenses/by/3.0/es/info:eu-repo/semantics/openAccessoai:diposit.ub.edu:2445/2197442026-05-27T06:46:51Z
dc.title.none.fl_str_mv Spectroscopic ellipsometry of very rough surfaces
title Spectroscopic ellipsometry of very rough surfaces
spellingShingle Spectroscopic ellipsometry of very rough surfaces
Bian, Subiao
Propietats òptiques
El·lipsometria
Optical properties
Ellipsometry
title_short Spectroscopic ellipsometry of very rough surfaces
title_full Spectroscopic ellipsometry of very rough surfaces
title_fullStr Spectroscopic ellipsometry of very rough surfaces
title_full_unstemmed Spectroscopic ellipsometry of very rough surfaces
title_sort Spectroscopic ellipsometry of very rough surfaces
dc.creator.none.fl_str_mv Bian, Subiao
Arteaga Barriel, Oriol
author Bian, Subiao
author_facet Bian, Subiao
Arteaga Barriel, Oriol
author_role author
author2 Arteaga Barriel, Oriol
author2_role author
dc.subject.none.fl_str_mv Propietats òptiques
El·lipsometria
Optical properties
Ellipsometry
topic Propietats òptiques
El·lipsometria
Optical properties
Ellipsometry
description This work expands the use of spectroscopic ellipsometry to surfaces with roughness that is similar to or larger than the wavelength of the incident light. By using a custom-built spectroscopic ellipsometer and varying the angle of incidence, we were able to differentiate between the diffusely scattered and specularly reflected components. Our findings demonstrate that measuring the diffuse component at specular angles is highly beneficial for ellipsometry analysis, as its response is equivalent to that of a smooth material. This allows for accurate determination of the optical constants in materials with extremely rough surfaces. Our results have the potential to broaden the scope and utility of the spectroscopic ellipsometry technique.
publishDate 2023
dc.date.none.fl_str_mv 2023
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv https://hdl.handle.net/2445/219744
url https://hdl.handle.net/2445/219744
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Reproducció del document publicat a: https://doi.org/10.1364/OE.490197
Optics Express, 2023, vol. 31, num.12, p. 19632-19645
https://doi.org/10.1364/OE.490197
dc.rights.none.fl_str_mv cc-by (c) Bian, Subiao, et al., 2023
http://creativecommons.org/licenses/by/3.0/es/
info:eu-repo/semantics/openAccess
rights_invalid_str_mv cc-by (c) Bian, Subiao, et al., 2023
http://creativecommons.org/licenses/by/3.0/es/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Optical Society of America
publisher.none.fl_str_mv Optical Society of America
dc.source.none.fl_str_mv Articles publicats en revistes (Física Aplicada)
reponame:Dipòsit Digital de la UB
instname:Universidad de Barcelona
instname_str Universidad de Barcelona
reponame_str Dipòsit Digital de la UB
collection Dipòsit Digital de la UB
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869404686746910720
score 15,81155

Similares en LA Referencia