Advanced Strategies in Thin Films Engineering by Magnetron Sputtering

© 2020 by the authors.

Detalles Bibliográficos
Autores: Palmero, Alberto, Martin, N.
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2020
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/209447
Acceso en línea:http://hdl.handle.net/10261/209447
Access Level:acceso abierto
Palabra clave:Magnetron sputtering
Nanostructures
Growth mechanisms
Functional properties
HiPIMS
Oblique angle deposition
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spelling Advanced Strategies in Thin Films Engineering by Magnetron SputteringPalmero, AlbertoMartin, N.Magnetron sputteringNanostructuresGrowth mechanismsFunctional propertiesHiPIMSOblique angle deposition© 2020 by the authors.This Special Issue contains a series of reviews and papers representing some recent results and some exciting perspectives focused on advanced strategies in thin films growth, thin films engineering by magnetron sputtering and related techniques. Innovative fundamental and applied research studies are then reported, emphasizing correlations between structuration process parameters, new ideas and approaches for thin films engineering and resulting properties of as-deposited coatings.Peer reviewedMultidisciplinary Digital Publishing InstituteConsejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]2020202020202020info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionhttp://hdl.handle.net/10261/209447reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Ingléshttps://doi.org/10.3390/coatings10040419Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/2094472026-05-22T06:33:51Z
dc.title.none.fl_str_mv Advanced Strategies in Thin Films Engineering by Magnetron Sputtering
title Advanced Strategies in Thin Films Engineering by Magnetron Sputtering
spellingShingle Advanced Strategies in Thin Films Engineering by Magnetron Sputtering
Palmero, Alberto
Magnetron sputtering
Nanostructures
Growth mechanisms
Functional properties
HiPIMS
Oblique angle deposition
title_short Advanced Strategies in Thin Films Engineering by Magnetron Sputtering
title_full Advanced Strategies in Thin Films Engineering by Magnetron Sputtering
title_fullStr Advanced Strategies in Thin Films Engineering by Magnetron Sputtering
title_full_unstemmed Advanced Strategies in Thin Films Engineering by Magnetron Sputtering
title_sort Advanced Strategies in Thin Films Engineering by Magnetron Sputtering
dc.creator.none.fl_str_mv Palmero, Alberto
Martin, N.
author Palmero, Alberto
author_facet Palmero, Alberto
Martin, N.
author_role author
author2 Martin, N.
author2_role author
dc.contributor.none.fl_str_mv Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Magnetron sputtering
Nanostructures
Growth mechanisms
Functional properties
HiPIMS
Oblique angle deposition
topic Magnetron sputtering
Nanostructures
Growth mechanisms
Functional properties
HiPIMS
Oblique angle deposition
description © 2020 by the authors.
publishDate 2020
dc.date.none.fl_str_mv 2020
2020
2020
2020
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Publisher's version
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/209447
url http://hdl.handle.net/10261/209447
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv https://doi.org/10.3390/coatings10040419
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869404396580765696
score 15,811543

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