Dual Ferroelectric Polarization and Dielectric Response Improvement in Epitaxial Hf0.5Zr0.5O2/HfO2 Nanolaminates

Nanolaminates based on ferroelectric polycrystalline doped HfO2 have gained interest because those compounds show enhanced functional properties. Here, we achieve coexisting improvement of remanent polarization and dielectric permittivity in wake-up-free epitaxial Hf0.5Zr0.5O2/HfO2 nanolaminates wit...

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Autores: Ghiasabadi Farahani, Mehrdad, Quintana, Alberto, Song, Tingfeng, Kumar, Rohit, Rubano, Andrea, Ali, Faizan, Sánchez Barrera, Florencio, Fina, Ignasi
Tipo de recurso: artículo
Estado:Versión aceptada para publicación
Fecha de publicación:2025
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:dnet:digitalcsic_::6488dcb36037dc4ca1e5077efd7eff36
Acceso en línea:http://hdl.handle.net/10261/430576
https://api.elsevier.com/content/abstract/scopus_id/85216036200
Access Level:acceso abierto
Palabra clave:Hf0.5Zr0.5O2
HfO2
Epitaxy
Ferroelectric
Hafnium oxide
Nanolaminate
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spelling Dual Ferroelectric Polarization and Dielectric Response Improvement in Epitaxial Hf0.5Zr0.5O2/HfO2 NanolaminatesGhiasabadi Farahani, MehrdadQuintana, AlbertoSong, TingfengKumar, RohitRubano, AndreaAli, FaizanSánchez Barrera, FlorencioFina, IgnasiHf0.5Zr0.5O2HfO2EpitaxyFerroelectricHafnium oxideNanolaminateNanolaminates based on ferroelectric polycrystalline doped HfO2 have gained interest because those compounds show enhanced functional properties. Here, we achieve coexisting improvement of remanent polarization and dielectric permittivity in wake-up-free epitaxial Hf0.5Zr0.5O2/HfO2 nanolaminates with different numbers of HfO2 nanolayers if compared with Hf0.5Zr0.5O2 single films of equivalent thickness or other reported polycrystalline nanolaminates. Comprehensive structural characterization reveals that the origin of the enhancement must be the larger amount of the orthorhombic phase in the nanolaminates. The retention of nanolaminates is greater than that of Hf0.5Zr0.5O2 single films; however, fatigue is larger and ferroelectric switching is slower in the nanolaminates compared with single layers. The present work reveals nanolamination in high-quality films as a strategy to increase dielectric permittivity without important degradation of other functional properties.Financial support from the Spanish Ministry of Science, Innovation, and Universities (MCIN/AEI/10.13039/501100011033) through the Severo Ochoa (CEX2023-001263-S), PDC2023-145874-I00, PID2020-112548RB-I00, PID2023-147211OB-C21, and PID2019-107727RB-I00 project program and from Generalitat de Catalunya (2021 SGR 00804) is acknowledged. We also acknowledge project TED2021-130453B-C21 funded by MCIN/AEI/10.13039/501100011033. T.S. is financially supported by the China Scholarship Council (CSC) with grant no. 201807000104. M.G.F. is financially supported by the Spanish Ministry of Science and Innovation with FPI2021 PRE2021-098067 fellowship funded by Fondo Social Europeo.With funding from the Spanish government through the ‘Severo Ochoa Centre of Excellence’ accreditation (CEX2023-001263-S).Peer reviewedAmerican Chemical SocietyAgencia Estatal de Investigación (España)Generalitat de CatalunyaChina Scholarship CouncilRubano, Andrea [0000-0002-9689-615X]Sánchez Barrera, Florencio [0000-0002-5314-453X]Fina, Ignasi [0000-0003-4182-6194]Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]202620262025info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Postprintinfo:eu-repo/semantics/acceptedVersionhttp://hdl.handle.net/10261/430576https://api.elsevier.com/content/abstract/scopus_id/85216036200reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglés#PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE#info:eu-repo/grantAgreement/AEI/Plan Estatal de investigación Científica y Técnica y de Innovación 2021-2023/CEX2023-001263-Sinfo:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2021-2023/PDC2023-145874-I00info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2020-112548RB-I00info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2021-2023/PID2023-147211OB-C21info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2019-107727RB-I00ACS applied materials & interfaceshttp://doi.org/10.1021/acsami.4c15867Síinfo:eu-repo/semantics/openAccessoai:dnet:digitalcsic_::6488dcb36037dc4ca1e5077efd7eff362026-05-22T06:33:51Z
dc.title.none.fl_str_mv Dual Ferroelectric Polarization and Dielectric Response Improvement in Epitaxial Hf0.5Zr0.5O2/HfO2 Nanolaminates
title Dual Ferroelectric Polarization and Dielectric Response Improvement in Epitaxial Hf0.5Zr0.5O2/HfO2 Nanolaminates
spellingShingle Dual Ferroelectric Polarization and Dielectric Response Improvement in Epitaxial Hf0.5Zr0.5O2/HfO2 Nanolaminates
Ghiasabadi Farahani, Mehrdad
Hf0.5Zr0.5O2
HfO2
Epitaxy
Ferroelectric
Hafnium oxide
Nanolaminate
title_short Dual Ferroelectric Polarization and Dielectric Response Improvement in Epitaxial Hf0.5Zr0.5O2/HfO2 Nanolaminates
title_full Dual Ferroelectric Polarization and Dielectric Response Improvement in Epitaxial Hf0.5Zr0.5O2/HfO2 Nanolaminates
title_fullStr Dual Ferroelectric Polarization and Dielectric Response Improvement in Epitaxial Hf0.5Zr0.5O2/HfO2 Nanolaminates
title_full_unstemmed Dual Ferroelectric Polarization and Dielectric Response Improvement in Epitaxial Hf0.5Zr0.5O2/HfO2 Nanolaminates
title_sort Dual Ferroelectric Polarization and Dielectric Response Improvement in Epitaxial Hf0.5Zr0.5O2/HfO2 Nanolaminates
dc.creator.none.fl_str_mv Ghiasabadi Farahani, Mehrdad
Quintana, Alberto
Song, Tingfeng
Kumar, Rohit
Rubano, Andrea
Ali, Faizan
Sánchez Barrera, Florencio
Fina, Ignasi
author Ghiasabadi Farahani, Mehrdad
author_facet Ghiasabadi Farahani, Mehrdad
Quintana, Alberto
Song, Tingfeng
Kumar, Rohit
Rubano, Andrea
Ali, Faizan
Sánchez Barrera, Florencio
Fina, Ignasi
author_role author
author2 Quintana, Alberto
Song, Tingfeng
Kumar, Rohit
Rubano, Andrea
Ali, Faizan
Sánchez Barrera, Florencio
Fina, Ignasi
author2_role author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Agencia Estatal de Investigación (España)
Generalitat de Catalunya
China Scholarship Council
Rubano, Andrea [0000-0002-9689-615X]
Sánchez Barrera, Florencio [0000-0002-5314-453X]
Fina, Ignasi [0000-0003-4182-6194]
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Hf0.5Zr0.5O2

HfO2
Epitaxy
Ferroelectric
Hafnium oxide
Nanolaminate
topic Hf0.5Zr0.5O2
HfO2
Epitaxy
Ferroelectric
Hafnium oxide
Nanolaminate
description Nanolaminates based on ferroelectric polycrystalline doped HfO2 have gained interest because those compounds show enhanced functional properties. Here, we achieve coexisting improvement of remanent polarization and dielectric permittivity in wake-up-free epitaxial Hf0.5Zr0.5O2/HfO2 nanolaminates with different numbers of HfO2 nanolayers if compared with Hf0.5Zr0.5O2 single films of equivalent thickness or other reported polycrystalline nanolaminates. Comprehensive structural characterization reveals that the origin of the enhancement must be the larger amount of the orthorhombic phase in the nanolaminates. The retention of nanolaminates is greater than that of Hf0.5Zr0.5O2 single films; however, fatigue is larger and ferroelectric switching is slower in the nanolaminates compared with single layers. The present work reveals nanolamination in high-quality films as a strategy to increase dielectric permittivity without important degradation of other functional properties.
publishDate 2025
dc.date.none.fl_str_mv 2025
2026
2026
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Postprint
info:eu-repo/semantics/acceptedVersion
format article
status_str acceptedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/430576
https://api.elsevier.com/content/abstract/scopus_id/85216036200
url http://hdl.handle.net/10261/430576
https://api.elsevier.com/content/abstract/scopus_id/85216036200
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv #PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
info:eu-repo/grantAgreement/AEI/Plan Estatal de investigación Científica y Técnica y de Innovación 2021-2023/CEX2023-001263-S
info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2021-2023/PDC2023-145874-I00
info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2020-112548RB-I00
info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2021-2023/PID2023-147211OB-C21
info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2019-107727RB-I00
ACS applied materials & interfaces
http://doi.org/10.1021/acsami.4c15867
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv American Chemical Society
publisher.none.fl_str_mv American Chemical Society
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,81155

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