A Single-chip AlScN PMUTs-on-CMOS hydrophone

This work presents a minute single-chip piezoelectric micromachined ultrasonic transducers (PMUTs)-on-complementary metal-oxide-semiconductor (CMOS)-based hydrophone with high receiving sensitivities and low noise. The system is based on three different Sc9.5%Al90.5%N PMUTs geometries: (a) square wi...

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Autores: Ledesma, Eyglis|||0000-0002-6967-6565, Uranga del Monte, Aránzazu|||0000-0002-3593-4060, Barniol i Beumala, Núria|||0000-0001-6325-2166
Tipo de recurso: artículo
Fecha de publicación:2024
País:España
Institución:Universitat Autònoma de Barcelona
Repositorio:Dipòsit Digital de Documents de la UAB
Idioma:inglés
OAI Identifier:oai:ddd.uab.cat:294987
Acceso en línea:https://ddd.uab.cat/record/294987
https://dx.doi.org/urn:doi:10.1109/JSEN.2024.3401455
Access Level:acceso abierto
Palabra clave:Hydrophone
Micro-electro-mechanical-system (MEMS) hydrophone
Piezoelectric micromachined ultrasonic transducers (PMUTs)
PMUTs-on-complementary metal-oxide-semiconductor (CMOS)
Receiving sensitivity (SR)
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repository_id_str
spelling A Single-chip AlScN PMUTs-on-CMOS hydrophoneLedesma, Eyglis|||0000-0002-6967-6565Uranga del Monte, Aránzazu|||0000-0002-3593-4060Barniol i Beumala, Núria|||0000-0001-6325-2166HydrophoneMicro-electro-mechanical-system (MEMS) hydrophonePiezoelectric micromachined ultrasonic transducers (PMUTs)PMUTs-on-complementary metal-oxide-semiconductor (CMOS)Receiving sensitivity (SR)This work presents a minute single-chip piezoelectric micromachined ultrasonic transducers (PMUTs)-on-complementary metal-oxide-semiconductor (CMOS)-based hydrophone with high receiving sensitivities and low noise. The system is based on three different Sc9.5%Al90.5%N PMUTs geometries: (a) square with an 80μ m side, (b) rectangular with a dimension of 60×40μ m, and (c) annular with an outer diameter of 80μ m which allows to carry out acoustic measurements at very close distances from the transducer under test. Each device is monolithically integrated with a CMOS low noise amplifier (LNA) amplifier with a gain of 25 dB. The first hydrophone prototype was validated in water where two commercial hydrophones from ONDA (HGL-0085 and HNC-0200) were used as references. The experimental results give mean receiving sensitivities of -234 dB re 1 V/ μ Pa (equivalent to 1.9 V/MPa), -234.6 dB re 1 V/ μ Pa (equivalent to 1.86 V/MPa), and -238.3 dB re 1 V/ μ Pa (equivalent to 1.22 V/MPa) for (a)-(c), respectively. These results demonstrate the high performance of the presented PMUTs-on-CMOS to be used in a miniaturized hydrophone for characterizing high-frequency ultrasound transducers. 22024-01-0120242024-01-01Articlehttp://purl.org/coar/resource_type/c_6501VoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85info:eu-repo/semantics/articleapplication/pdfhttps://ddd.uab.cat/record/294987https://dx.doi.org/urn:doi:10.1109/JSEN.2024.3401455reponame:Dipòsit Digital de Documents de la UABinstname:Universitat Autònoma de BarcelonaInglésengAgencia Estatal de Investigación https://doi.org/10.13039/501100011033 PID2019-108270RB-I00Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 PID2022-136624OB-I00open accesshttp://purl.org/coar/access_right/c_abf2Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, i la comunicació pública de l'obra, sempre que no sigui amb finalitats comercials, i sempre que es reconegui l'autoria de l'obra original. No es permet la creació d'obres derivades.https://creativecommons.org/licenses/by-nc-nd/4.0/info:eu-repo/semantics/openAccessoai:ddd.uab.cat:2949872026-06-06T12:50:31Z
dc.title.none.fl_str_mv A Single-chip AlScN PMUTs-on-CMOS hydrophone
title A Single-chip AlScN PMUTs-on-CMOS hydrophone
spellingShingle A Single-chip AlScN PMUTs-on-CMOS hydrophone
Ledesma, Eyglis|||0000-0002-6967-6565
Hydrophone
Micro-electro-mechanical-system (MEMS) hydrophone
Piezoelectric micromachined ultrasonic transducers (PMUTs)
PMUTs-on-complementary metal-oxide-semiconductor (CMOS)
Receiving sensitivity (SR)
title_short A Single-chip AlScN PMUTs-on-CMOS hydrophone
title_full A Single-chip AlScN PMUTs-on-CMOS hydrophone
title_fullStr A Single-chip AlScN PMUTs-on-CMOS hydrophone
title_full_unstemmed A Single-chip AlScN PMUTs-on-CMOS hydrophone
title_sort A Single-chip AlScN PMUTs-on-CMOS hydrophone
dc.creator.none.fl_str_mv Ledesma, Eyglis|||0000-0002-6967-6565
Uranga del Monte, Aránzazu|||0000-0002-3593-4060
Barniol i Beumala, Núria|||0000-0001-6325-2166
author Ledesma, Eyglis|||0000-0002-6967-6565
author_facet Ledesma, Eyglis|||0000-0002-6967-6565
Uranga del Monte, Aránzazu|||0000-0002-3593-4060
Barniol i Beumala, Núria|||0000-0001-6325-2166
author_role author
author2 Uranga del Monte, Aránzazu|||0000-0002-3593-4060
Barniol i Beumala, Núria|||0000-0001-6325-2166
author2_role author
author
dc.subject.none.fl_str_mv Hydrophone
Micro-electro-mechanical-system (MEMS) hydrophone
Piezoelectric micromachined ultrasonic transducers (PMUTs)
PMUTs-on-complementary metal-oxide-semiconductor (CMOS)
Receiving sensitivity (SR)
topic Hydrophone
Micro-electro-mechanical-system (MEMS) hydrophone
Piezoelectric micromachined ultrasonic transducers (PMUTs)
PMUTs-on-complementary metal-oxide-semiconductor (CMOS)
Receiving sensitivity (SR)
description This work presents a minute single-chip piezoelectric micromachined ultrasonic transducers (PMUTs)-on-complementary metal-oxide-semiconductor (CMOS)-based hydrophone with high receiving sensitivities and low noise. The system is based on three different Sc9.5%Al90.5%N PMUTs geometries: (a) square with an 80μ m side, (b) rectangular with a dimension of 60×40μ m, and (c) annular with an outer diameter of 80μ m which allows to carry out acoustic measurements at very close distances from the transducer under test. Each device is monolithically integrated with a CMOS low noise amplifier (LNA) amplifier with a gain of 25 dB. The first hydrophone prototype was validated in water where two commercial hydrophones from ONDA (HGL-0085 and HNC-0200) were used as references. The experimental results give mean receiving sensitivities of -234 dB re 1 V/ μ Pa (equivalent to 1.9 V/MPa), -234.6 dB re 1 V/ μ Pa (equivalent to 1.86 V/MPa), and -238.3 dB re 1 V/ μ Pa (equivalent to 1.22 V/MPa) for (a)-(c), respectively. These results demonstrate the high performance of the presented PMUTs-on-CMOS to be used in a miniaturized hydrophone for characterizing high-frequency ultrasound transducers.
publishDate 2024
dc.date.none.fl_str_mv 2
2024-01-01
2024
2024-01-01
dc.type.none.fl_str_mv Article
http://purl.org/coar/resource_type/c_6501
VoR
http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://ddd.uab.cat/record/294987
https://dx.doi.org/urn:doi:10.1109/JSEN.2024.3401455
url https://ddd.uab.cat/record/294987
https://dx.doi.org/urn:doi:10.1109/JSEN.2024.3401455
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.relation.none.fl_str_mv Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 PID2019-108270RB-I00
Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 PID2022-136624OB-I00
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
https://creativecommons.org/licenses/by-nc-nd/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
https://creativecommons.org/licenses/by-nc-nd/4.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:Dipòsit Digital de Documents de la UAB
instname:Universitat Autònoma de Barcelona
instname_str Universitat Autònoma de Barcelona
reponame_str Dipòsit Digital de Documents de la UAB
collection Dipòsit Digital de Documents de la UAB
repository.name.fl_str_mv
repository.mail.fl_str_mv
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